H_75nm_L1_65um_D_4um

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Unformatted text preview: 9E-5 1.32612839753662E-4 0 1.26641535036498E-7-2.615090235267494E-8i 6.555470040211638E-8-3.4991341457868925E-8i 2.3978329145448415E-5-6.2138067040088365E-6i -6.734556722472689E-5 1.3009736130089916E-4 0 6.713411591165373E-7-1.2480709312264908E-7i -1.3190103675952969E-8-2.091621937554728E-8i 3.3512476397101916E-5-8.46433317433327E-6i -6.7204776118599E-5 1.267448543972769E-4 0 1.949438894638736E-6-3.94607072121365E-7i 5.645226938495883E-9-2.6379030650037278E-8i 3.598640195412136E-5-9.16105155836078E-6i -6.787137551871762E-5 1.283859255396587E-4 0 8.141232766286273E-7-1.7564848010705642E-7i 3.708904572278608E-7-9.036609512717378E-8i 3.890687242138305E-5-9.693880753673563E-6i -6.530562237562182E-5 1.3107493634458275E-4 0 2.9370264632705425E-7-6.007852308975714E-8i 9.045384663508571E-9-2.2229260010497852E-8i 2.7682627734844584E-5-7.112067228828407E-6i -6.650134329045191E-5 1.3077183461708244E-4 4.370004906582986E-6 -7.682989540785252E-6+1.8081149451750396E-6i -3.1996589840061625E-6+8.310409817123322E-7i 2.5587527442637083E-5-6.7168775677903246E-6i -6.53940193983483E-5 1.285690437262302E-4 0 5.157866724211924E-7-1.0819970919176144E-7i 1.1433936782101473E-7-4.749243453675309E-8i 2.9480117733446086E-5-7.595650415276634E-6i -6.591457063201768E-5 1.2676960970820294E-4 2.63356205768413E-6 -5.625417656770354E-6+1.3319629056443572E-6i -2.0497384903756546E-6+5.265015211620983E-7i 3.0135646911706727E-5-7.821048731571079E-6i -6.537636850139112E-5 1.232931163985772E-4 0 1.997341679167708E-7-4.403484213346232E-8i 3.271122348528171E-8-2.7420278456273414E-8i 3.360581333484392E-5-8.696960309260505E-6i -6.535355397797486E-5 1.2600165052780696E-4 0 3.2135351329155847E-7-6.93560024793427E-8i 9.224024539178365E-8-4.184728434053486E-8i 3.148115611112641E-5-8.124358484231392E-6i -6.353511997098769E-5 1.2745386653936522E-4 0 -1.224960766093513E-7+2.8368643273996636E-8i 1.9633503162758753E-8-2.388629750629503E-8i 2.7298367422472908E-5-7.096635801789721E-6i -6.278228820537003E-5 1.2988520368373583E-4 0 3.9744274027767035E-7-8.572210992198921E-8i 6.994907141011364E-8-3.6927502338376016E-8i 2.4802094056611228E-5-6.453318330599461E-6i -6.221443023310542E-5 1.4587298609765117E-4 0 6.773262151654241E-8-1.0044149905736271E-8i 3.8014098709757894E-8-2.4717367503767174E-8i 1.6167403948694497E-5-4.213590862022132E-6i -6.339351391366746E-5 1.4968298640801177E-4 0 2.9180320460879077E-8-3.5733640814846385E-10i 4.395442062491567E-8-2.444110789263353E-8i 1.5202217301193294E-5-3.954002758901757E-6i -6.237142285911333E-5 1.5358561267280455E-4 0 1.7775653490814669E-9+4.57055442937282E-9i 2.512572660207102E-8-2.02709634800069E-8i 1.3315157675732406E-5-3.487686511910318E-6i -6.204876900017846E-5 1.5250062298144702E-4 2.816968910551719E-6 -8.86328191834636E-7+2.1946438444078983E-7i -9.38611496071783E-7+2.2320894469924812E-7i 1.345882893820608E-5-3.5305539641618002E-6i -6.267080008950351E-5 1.2516667843915643E-4 0 3.289086074623193E-7-7.270393434788413E-8i 5.1033024084379264E-8-3.3364915599798374E-8i 2...
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This document was uploaded on 01/24/2014.

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