H_75nm_L1_65um_D_4um

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Unformatted text preview: 95080268E-9i -2.965899370742177E-8-3.076367603121228E-9i 8.244434216555567E-7-1.7693582245081826E-7i 2.1819541613478713E-4 1.5484066500090233E-4 7.936199408465469E-7 -7.4029999522586855E-9-1.2138173470214257E-8i 5.840418553467866E-9-2.917775346541667E-8i 8.182578207963377E-7-1.7396173959364816E-7i 2.1693388541521602E-4 1.5695140773990917E-4 0 4.02540806417051E-9-5.121416005084839E-9i 4.725766202819636E-9-5.561370706671804E-9i 7.957462460179409E-7-1.5044051939998327E-7i 2.1574913331604714E-4 1.5499999999999992E-4 7.500000000000001E-8 -2.5509134278099872E-9-2.8954219253384092E-9i 4.1662953271331714E-8-6.721743723887201E-8i 8.49134199570977E-7-1.457488709765443E-7i 2.1572411055761502E-4 1.5499999999999992E-4 0 -7.172942199245875E-10+4.7715633324390584E-12i -2.4234682737265884E-8-7.513274345969072E-8i 8.239016933489496E-7-1.1814798357712153E-7i 2.0018735432009553E-4 1.5499999999999992E-4 7.500000000000001E-8 -1.9015679811698085E-9-1.8221296314022486E-9i 4.096107355932852E-8-9.690739589547968E-8i 1.1632568751920926E-6-6.502247617984674E-8i 2.0016960934660428E-4 1.5499999999999992E-4 0 5.534463882734923E-9+3.5855615983346363E-9i -4.6895173733467206E-8-4.492471668603035E-8i 1.1003686949072593E-6-4.417244180332416E-8i 1.9845517733227847E-4 1.5499999999999995E-4 7.500000000000004E-8 7.733086277293192E-10+3.5687379571364194E-10i -2.0099009777641738E-8-9.584624940064059E-8i 1.168303285407543E-6-5.897518965382255E-8i 1.9973401674058098E-4 1.5582958717247242E-4 8.965720678432674E-8 7.0898447160870626E-9+6.823640370627604E-9i -3.33276537673767E-8-1.8378803043036032E-8i 1.040368977037797E-6-9.417222836426349E-8i 1.8892272170811537E-4 1.5695501482364146E-4 0 2.19013901860219E-9-1.6974394125533754E-9i 1.6383478124642548E-8-4.225770412573642E-10i 1.1021146469881626E-6-1.3255315179579476E-7i 1.880715396411804E-4 1.5499999999999995E-4 0 3.028980087221277E-9+3.748886716033531E-9i -5.705884397762163E-8-4.1783545108039816E-8i 1.3054403933555805E-6-1.1801137723378124E-8i 1.8979983531338375E-4 1.5499999999999992E-4 0 1.0058059811863E-9-2.2149410382026737E-9i -3.9858586328736716E-8-3.8164976115175646E-8i 1.2823384060182406E-6-8.746916950392561E-9i 1.8858687876553595E-4 1.55957116476106E-4 1.6247201728109287E-7 -7.024605997146133E-9-7.028816581891584E-9i -1.5806549114039115E-8-2.4126280975811377E-8i 1.1868716674729492E-6-8.776395732531216E-8i 1.8944287283620566E-4 1.5577881667273513E-4 3.847757286509998E-7 4.151550412969028E-10-1.3597906639969563E-9i -6.788510522744002E-8-3.9243619852073255E-8i 1.169736433685136E-6-8.87572433253587E-8i 1.9069062759018274E-4 1.5698044624261508E-4 0 7.752294142997912E-10-2.5047427294871047E-9i 1.8360434351106115E-8+1.2739695726662083E-9i 1.071602189192318E-6-1.3950062027287042E-7i 1.9104022757950674E-4 1.5590339176012896E-4 9.607758228119838E-8 8.57564287565111E-9+3.4935030970503766E-9i -3.6994652625804356E-8-1.328034287646889E-8i 1.1600594676743877E-6-8.204726646767579E-8i 1.9152813098558726E-4 1.5499999999999995E-4 0 2.0468429160781594E-9+7.8214...
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This document was uploaded on 01/24/2014.

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