H_75nm_L1_65um_D_4um

752002205702412e 6 49999999999999996e 6

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Unformatted text preview: 30033E-6-2.0745512683111255E-7i 1.5611066168575786E-4 6.771260749081513E-6 7.500000000000001E-8 -4.681085760606819E-9-5.230655111283501E-9i 6.722134616672431E-7+2.785493402490961E-7i 2.2464182319414495E-6-3.257646194609073E-7i 1.53538326066826E-4 4.999999999999998E-6 7.499999999999998E-8 -7.116191299561449E-9-2.6373112296194698E-9i 9.41908767681915E-8+1.2252270754833336E-7i 2.7853072935883367E-6-9.142933178969135E-8i 1.535316076122451E-4 4.999999999999999E-6 0 1.571688123486076E-8+2.2828409739705454E-9i 1.5433823739193633E-7-2.4192502580344862E-8i 2.7451606283191102E-6-5.977102377661091E-8i 1.531233263890711E-4 4.083511134849989E-6 1.535654324455914E-7 1.1727863395813616E-8+8.175612181769699E-9i 8.786132484869856E-8+2.2499078993266873E-8i 2.5399529704475533E-6-1.950222681093072E-7i 1.5446080109499886E-4 6.617552208593491E-6 7.500000000000002E-8 -1.2607650641693151E-8-7.35422220322432E-9i 6.404351623361103E-7+2.716402154824461E-7i 2.3223895534818445E-6-3.1609009731417823E-7i 1.7261976577170253E-4 -7.302981269269628E-6 1.8841721974613519E-6 -5.4546416985046574E-8-7.648650580113586E-9i -3.412479088362058E-7-1.3791818834503863E-7i 1.8015085182680461E-6-3.0768433907584437E-7i 1.6884948219360037E-4 -7.30527911689706E-6 1.5642215202827226E-6 -4.8459611206377404E-8-7.081895700191828E-9i -3.77678056781681E-7-1.5544437375006094E-7i 1.889157484163985E-6-3.1219945216696806E-7i 1.7259862364875947E-4 -8.88867906587875E-6 7.500000000000002E-8 -2.769271951186157E-8-1.5840819141820564E-8i -4.514746481179862E-7-1.7689280352541136E-7i 1.713350970727805E-6-3.487181206001455E-7i 1.6989392022740622E-4 -8.694110363790083E-6 7.5E-8 -2.5392064235526706E-8-1.4576995957240588E-8i -4.827664287797054E-7-1.923716835933673E-7i 1.775733993417891E-6-3.515893713947522E-7i 1.674461430412961E-4 -8.835814739984414E-6 7.500000000000001E-8 -2.4767180418783208E-8-1.4293337722963169E-8i -4.90323414286981E-7-1.9699298433052524E-7i 1.8185608601639578E-6-3.6051853392283866E-7i 1.6603328840409756E-4 -1.0591835250818102E-5 7.500000000000001E-8 -3.662087566962105E-8-2.031880881148706E-8i -4.829712601938515E-7-1.9002592243513405E-7i 1.7563375212798195E-6-3.9998843569535043E-7i 2.225264977698084E-4 -3.8175707858607687E-5 0 7.423868998666853E-9-2.769866332023969E-9i 2.521916464013039E-10+2.3216311426239813E-10i 1.1139165479515706E-6-1.1070959742677048E-7i 2.2087431378075534E-4 -3.158150803081393E-5 0 1.8061683877534506E-8+5.460817949160394E-9i -9.872770324252482E-10-8.354959143455599E-10i 1.162987045006274E-6-8.960567602284949E-8i 2.2024085659178746E-4 -3.100496495583284E-5 2.9291713169071103E-7 -1.8737953167823757E-8-1.5721838089971345E-8i 1.1233195270992334E-8+8.164761294143785E-9i 1.2082261075997854E-6-5.96928761625393E-8i 2.1512423773529938E-4 -4.9360101688764304E-5 7.500000000000001E-8 -4.054304045657314E-7-2.1269576691418925E-7i -1.255305228144514E-8-2.0528879442106254E-9i 1.1118977180271799E-6-1.7492479668799366E-7i 2.2071031589595094E-4 -5.7323686477403886E-5 0 1.5148051892335655E-8+9.831204998113558E-9i 1.3083994...
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This document was uploaded on 01/24/2014.

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