H_75nm_L1_65um_D_4um

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Unformatted text preview: 0795E-5 -1.5581679711201466E-4 2.1443202148869036E-7 -9.187195323449661E-9+2.33516246022398E-10i 4.325006117530553E-8+3.9873599277532156E-8i 2.5966225756532798E-6-4.513619068908871E-7i 7.980444474998227E-5 -1.569115385825124E-4 0 3.1640291661289475E-9-2.9236677261760178E-9i -1.562843056032194E-8-3.377403125327689E-10i 2.5146800711542354E-6-5.03684020571424E-7i 7.485546318937092E-5 -1.5695102592559743E-4 0 1.2235059708600626E-9-7.823961814216787E-9i -1.2105215172532286E-8-3.830719313709868E-9i 2.5807041324696695E-6-5.614041890201743E-7i 7.22464940797778E-5 -1.5499999999999992E-4 7.500000000000001E-8 1.259298595185982E-8-1.6351448744394365E-10i -7.623912510820821E-8+9.268882713362065E-8i 2.7334699919916416E-6-5.538068928599565E-7i 7.227498744151489E-5 -1.5499999999999995E-4 0 8.39737648804218E-9-7.000572350767838E-9i 2.0158754454129442E-7+2.236758649163123E-8i 2.6612988030284834E-6-5.063880148259425E-7i 7.314885254294722E-5 -1.5633452402386564E-4 0 -2.4009951756018395E-10-1.2199640781446765E-9i 8.709867641257091E-9-6.099252501761282E-9i 2.630830401487552E-6-5.642383146125056E-7i 7.397774751338085E-5 -1.5499999999999997E-4 7.500000000000002E-8 5.924931180227577E-9+1.69388747993382E-9i -7.122737107053999E-8+1.1420221295197684E-7i 2.74839459190559E-6-5.242985649101734E-7i 7.456967897152586E-5 -1.5582922330444093E-4 2.4601071282504064E-7 -6.370038797038584E-9-2.5904349335224642E-9i 3.1905295231922966E-8+1.902898181289319E-8i 2.636617875026157E-6-5.233268073691542E-7i 7.140644799905603E-5 -1.5668965991552975E-4 0 -1.039913063174411E-9-1.2952997319640664E-10i -1.4904620368882364E-8+5.486582866231453E-9i 2.648579970147997E-6-5.95012464628178E-7i 7.485202548005507E-5 -1.5337911318039264E-4 7.500000000000001E-8 4.026263323783641E-8+1.8119370184810357E-8i 2.429538628438699E-7+1.1291856607566209E-7i 2.654122010496307E-6-6.123715567225661E-7i 7.564773991712105E-5 -1.5525518454896547E-4 1.1213519627389062E-6 -5.224744044773315E-9+1.3458920772759547E-8i 7.477806464813361E-8+6.588067681766769E-8i 2.6536166809263447E-6-5.421434072840169E-7i 7.651048926282223E-5 -1.5387930665610735E-4 7.500000000000001E-8 2.8414410228756862E-8+1.0582281742807257E-8i 2.5751042493562326E-7+1.3646924078165992E-7i 2.6521241377716027E-6-5.77791702784969E-7i 7.814334445397614E-5 -1.5324212939515995E-4 7.500000000000001E-8 4.420451590533836E-8+1.5938880722210502E-8i 2.968811492038391E-7+1.4829956533277122E-7i 2.5751984479065255E-6-5.845468246891907E-7i 7.705443340843282E-5 -1.5438005866342085E-4 1.0474817110359104E-6 6.589000835781036E-9+1.7749026184744732E-8i 1.7488357596650897E-7+9.821496368311558E-8i 2.6467967760867124E-6-5.527006529235256E-7i 7.642429294309906E-5 -1.5166849817014076E-4 7.500000000000001E-8 7.914125074186416E-8+3.5601312561938594E-8i 2.1623230705479348E-7+1.155207436206698E-7i 2.574191214815956E-6-6.366234220819155E-7i 7.484605365795439E-5 -1.528306667741147E-4 1.330614306142006E-6 3.148997780006249E-8+3.721513264733221E-8i 1.6792377189735357E-7+7.962621001805246E-8i 2.6384555462407...
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This document was uploaded on 01/24/2014.

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