H_75nm_L1_65um_D_4um

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Unformatted text preview: 05E-8i 1.321021939924088E-6-1.3533890977451574E-7i 1.7096669037805324E-4 1.5651058490113697E-4 -2.461320742363855E-6 3.135025467275888E-8-3.021358559607973E-9i 1.319650817354134E-7+4.8148340325588485E-8i 1.2703695815922832E-6-1.5304103322140469E-7i 1.3103778245846776E-4 1.5499999999999995E-4 0 -7.807964844801329E-10-4.197282733390636E-9i 2.4143077720499894E-7+1.2502236612280686E-7i 2.167955962545758E-6-2.821099038568329E-8i 1.3276607813067119E-4 1.5499999999999992E-4 0 8.12875708793015E-9+6.10354064511931E-10i 2.2302690819332695E-7+1.1647475173054894E-7i 2.173738689005092E-6-8.633597539405676E-9i 1.327653767264878E-4 1.5635240263293948E-4 -1.1266353440716698E-6 1.761102215628013E-8-5.174580185826914E-9i 1.1368989801530116E-7+3.85180727788953E-8i 1.8134628798236949E-6-1.829679663060274E-7i 1.612510947258063E-4 1.5637628601500195E-4 0 2.6705647175196616E-9-1.669375059076512E-9i -1.3211471873726045E-8-2.3656391408277688E-8i 1.4952680381881565E-6-1.0816487651775534E-7i 1.472993062326116E-4 1.5546539115345422E-4 -8.51890645054371E-7 1.5714090379967406E-8-2.2043570595611796E-9i 1.6528224737970667E-7+7.071213162216544E-8i 1.7342084245343392E-6-9.720831671833352E-8i 1.4659244350829852E-4 1.5499999999999997E-4 0 6.719686483983023E-9-5.911838721686657E-10i 2.2075585372795247E-7+1.186416481765984E-7i 1.9867637019942203E-6+2.1806035649089482E-8i 1.4735589546207046E-4 1.5682088423098873E-4 0 1.8307309165656515E-9-2.7718747079376526E-9i -8.807414749768816E-9-1.903376471811586E-8i 1.616962942887645E-6-1.536601464676237E-7i 1.4486414783609504E-4 1.5499999999999995E-4 0 -2.526803621951771E-9-4.048137932505247E-9i 2.624218727378484E-7+1.3911495777042815E-7i 2.014348082193909E-6+1.6580205855719753E-8i 1.45474637618825E-4 1.554541797088994E-4 -9.838412604501639E-7 1.5825341640601787E-8-3.2982899127176337E-9i 1.8165712236586224E-7+7.663283925572056E-8i 1.731123612961835E-6-1.154354589624762E-7i 1.44278556529207E-4 1.5487597558520866E-4 -7.174119471913268E-7 1.60181026778843E-8-9.238482091602126E-10i 2.8356092328012925E-7+1.3395226041718286E-7i 1.8295144765962297E-6-8.204473385398092E-8i 1.431358521638916E-4 1.549999999999999E-4 0 8.227586559976484E-9+1.1004011275566976E-9i 2.554600812565839E-7+1.324990256997417E-7i 2.0155076904025598E-6+3.3118719451914414E-9i 1.414075564916882E-4 1.549999999999999E-4 0 -3.585460567334664E-9-4.874381831151964E-9i 2.5382569927584375E-7+1.3258634660612826E-7i 2.0588897944431553E-6+1.0060490825840194E-8i 1.417068408725919E-4 1.5548766860471494E-4 -1.3864104465318E-6 2.15117728509612E-8-4.182632109309326E-9i 2.050354003109623E-7+8.551476240257407E-8i 1.7321168691489346E-6-1.4812792005121303E-7i 1.4025145921870485E-4 1.5509038532587153E-4 -1.0186078815279226E-6 1.686365936630506E-8-3.7210193897966066E-9i 2.505124397260301E-7+1.1297691599295969E-7i 1.8157750862120484E-6-1.2167172397439344E-7i 1.3449437380287456E-4 1.549999999999999E-4 0 -1.447510324566655E-9-3.5976956807200664E-9i 3.0179068357390066E-7+1.5540467621883604E-7i 2.1446979684836836E...
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This document was uploaded on 01/24/2014.

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