H_75nm_L1_65um_D_4um

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Unformatted text preview: 14E-8i 9.79754405040626E-8-2.5446774800503932E-8i -1.6466521535089019E-7+4.289316450495234E-8i -2.591439716432874E-4 2.5907415665242474E-4 -6.676522622711448E-4 -1.066569565141836E-8+2.672243213660031E-9i 1.357237287782987E-8-3.5229827830538182E-9i -2.1898177803079295E-8+5.7102808560860505E-9i -2.7302668440989215E-4 2.729531293302332E-4 -7.034193477499563E-4 -2.151456756944468E-11+4.4932192778495064E-12i 2.305876011593676E-11-6.000155757841629E-12i -3.8437280504428643E-11+1.037428020999472E-11i -2.776542553320937E-4 2.7757945355616937E-4 -7.153417095762267E-4 -2.499280495067599E-19-4.457523373947577E-19i 6.6904432002239925E-19-1.7288383728887662E-19i 3.7041697947766983E-19+1.2460790342257813E-19i -1.9446455819433037E-4 2.387693840082882E-4 -6.816720009407651E-4 -2.873356016472819E-8+7.016713570139701E-9i 8.85671683932296E-8-2.298776978175506E-8i -1.684924283232842E-7+4.381753645105843E-8i -1.980002774342273E-4 2.4311064553571163E-4 -6.940660373215063E-4 -7.363292184940841E-9+1.812651368010236E-9i 1.264025020897016E-8-3.280147066880804E-9i -2.3340401396648322E-8+6.07386693513296E-9i -1.338610354578244E-4 2.0747242261650738E-4 -7.060739458723826E-4 -5.9912471523958235E-9+1.1023730533592854E-9i 7.37309803044827E-8-1.91183669647078E-8i -1.7062183053958598E-7+4.429192514908202E-8i -1.362948724661485E-4 2.1124464848226208E-4 -7.189116539791532E-4 -4.0584842617735705E-9+9.526735708344023E-10i 1.1085668169308526E-8-2.875884161938617E-9i -2.49018062230643E-8+6.4681480553875916E-9i -6.125865582339914E-5 1.8828500272029578E-4 -7.213183311391222E-4 1.8768097279008385E-8-5.3192555759729426E-9i 6.252263363820161E-8-1.6193020960887087E-8i -1.634612223869591E-7+4.234282747740047E-8i -6.237244956564276E-5 1.9170836640611935E-4 -7.344332098871061E-4 -2.0832729706187195E-10-4.612924858252164E-11i 9.715784570703188E-9-2.5194641381229296E-9i -2.5088999895245047E-8+6.5033744038888025E-9i -2.0860743515391806E-4 2.5613443011798185E-4 -7.312481464637299E-4 -1.6307477439782952E-11+3.0534911889282655E-12i 2.2060835720587133E-11-5.732574351662469E-12i -4.215288820173342E-11+1.1187105638832367E-11i -2.1214315439381496E-4 2.604756916454053E-4 -7.436421828444711E-4 -8.608008548829428E-20-5.06719126105764E-19i 6.61061998313828E-19-1.5187439344440084E-19i 2.7417167386474384E-19+6.527237425107079E-20i -1.4359638349112082E-4 2.2256132607952617E-4 -7.574247782994648E-4 -1.0972822597049983E-11+1.6488285418229349E-12i 2.018510842218182E-11-5.2079893721838345E-12i -4.6784925947616286E-11+1.2282293546174932E-11i -1.4603022049944494E-4 2.2633355194528088E-4 -7.702624864062355E-4 1.2783312715513002E-19-5.89567214408327E-19i 6.058784703433795E-19-1.5429961583258712E-19i 2.272406836975069E-19+1.0056369872172523E-20i -6.571383079237367E-5 2.0197845746359013E-4 -7.737778461310584E-4 -4.2968827069821444E-12-8.087282277859279E-14i 1.810320396166929E-11-4.675634624002917E-12i -4.917838544454265E-11+1.2850896860529168E-11i -6.68276245346173E-5 2.0540182114941373E-4 -7.868927248790424E-4 2.834068732504116E-19-6.3...
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This document was uploaded on 01/24/2014.

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