H_75nm_L1_65um_D_4um

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Unformatted text preview: 29E-8i 8.565038921145561E-7-1.8704936865478464E-7i 2.0701904481469933E-4 1.4865543021134477E-4 7.500000000000001E-8 -6.300151439032203E-8-3.1545158267649864E-8i -1.3308483924681646E-7-6.442792606919933E-8i 8.427170412648076E-7-2.0278406234143727E-7i 2.0888064521490008E-4 1.4514656860382876E-4 7.500000000000001E-8 -1.001432332939255E-7-4.9097388127233736E-8i -1.0339591321306171E-7-4.884129100848892E-8i 8.213823953130059E-7-2.10272426210556E-7i 2.1587141556276738E-4 1.4896424883964124E-4 2.9911107410243847E-6 -7.379047355165892E-8-3.047678588149283E-8i -4.5577600844176604E-8-1.9098692989921283E-8i 8.235979303247404E-7-1.719282027118386E-7i 2.1521086726177137E-4 1.5293896460660057E-4 2.8026021955170777E-6 -4.3838464655101655E-8-1.5417455630284E-8i -4.466070360864179E-8-2.4164565682681204E-8i 8.228723517907124E-7-1.6899498831375699E-7i 2.1305681516510717E-4 1.558601220619413E-4 2.0644367936770936E-6 -2.244548960540085E-8-6.0004346006142415E-9i -2.8266537650708775E-8-2.6196541525854897E-8i 8.407431118561602E-7-1.5635839734728485E-7i 2.0949230409534724E-4 1.5675161717335943E-4 3.649951014766495E-6 -3.5241276717017446E-8-4.67485454208894E-9i -4.433157926955777E-8-2.4888469597528002E-8i 8.534960820328791E-7-1.6051261336247671E-7i 2.1156020442809897E-4 1.5289665545103396E-4 2.904558702033557E-6 -4.7241545130310015E-8-1.3728173593598628E-8i -7.001802211525413E-8-3.623396658057901E-8i 8.472448880162022E-7-1.7113111370750977E-7i 2.0807084223320408E-4 1.5347387213906626E-4 2.4708993171720297E-6 -3.9598436294641656E-8-1.0855309010673271E-8i -9.025540345973832E-8-4.838917620460167E-8i 8.837398382834062E-7-1.674528289713127E-7i 2.2409025475109612E-4 1.610979730843712E-4 4.96891142694273E-6 -2.885317987640502E-8-7.63560109508666E-10i -1.647217014318212E-8-3.657106372922883E-9i 7.17952283379679E-7-1.5606888263388466E-7i 2.090145598299874E-4 1.6663579217909982E-4 0 2.4073794237010752E-9-2.169786936359391E-9i 2.8938985754310914E-9-3.828606780980975E-9i 7.95541360556677E-7-1.6563478528018884E-7i 2.0558392274593138E-4 1.6190301548477722E-4 0 2.212551653726406E-9-1.975981615311151E-9i 3.536076896527087E-9-5.237160536761835E-9i 8.524210422632754E-7-1.6175184712998028E-7i 2.1037457110622147E-4 1.6183287056403294E-4 3.972197823722311E-6 -2.8440847942626674E-8-8.427001031872925E-10i -2.364039668311394E-8-1.0387213145060352E-8i 8.103026030867164E-7-1.6373276895327728E-7i 2.1580702602543315E-4 1.6292591076175309E-4 4.926545081130234E-6 -3.1635254922070775E-8-2.998577848105177E-10i -2.1535798124485302E-8-6.876176838050715E-9i 7.641514153881681E-7-1.6205209967639984E-7i 2.1457966507517574E-4 1.678454688229902E-4 0 2.2016482859309143E-9-2.4139115163247176E-9i 1.7805951275001171E-9-3.6184856709644644E-9i 7.531852169194346E-7-1.6198638902781435E-7i 2.2516709341397948E-4 1.650690562220468E-4 0 2.332395758347028E-9-2.9651841190295844E-9i 1.7139011064456209E-9-2.5784960952358426E-9i 6.992885659718468E-7-1.5399098214685373E-7i 2.2086471083284544E-4 1.67169549251052E-4 4.562177858088568E...
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This document was uploaded on 01/24/2014.

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