H_75nm_L1_65um_D_4um

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Unformatted text preview: 26785E-6-2.6405129116365155E-6i -1.0178046541453585E-4 1.5608190694124313E-4 2.56775995160955E-6 -1.3813020823006403E-6+4.032107989716512E-7i -1.04395589721921E-5+2.4400387521028013E-6i 2.858278045549578E-5-7.474565345841257E-6i -8.530043378848144E-5 1.6557161665798693E-4 3.7688460999781167E-6 -7.584805815177321E-7+2.1388119366035074E-7i -1.863819094584139E-6+4.585765605735007E-7i 1.3852021871967162E-5-3.659878283165998E-6i -9.190339663262196E-5 1.6645048615435284E-4 0 -4.662244491865836E-8+2.2596660831609163E-8i -2.9227447337354384E-8+4.757734954464866E-10i 1.4989075730553684E-5-3.964044844497064E-6i -9.545413408532495E-5 1.6240046831472266E-4 0 5.5163411942851793E-8-3.912304107761555E-9i 1.83465063215843E-7-4.8273338940779675E-8i 1.8824433957855722E-5-4.939607643489361E-6i -9.790111751538484E-5 1.615185064195157E-4 4.350312363036349E-6 -1.102628048396502E-6+3.2321688878056965E-7i -4.412329710103161E-6+1.0934860447160422E-6i 1.9051557788490897E-5-5.038929379176399E-6i -8.932164455078409E-5 1.6180066750660747E-4 0 1.881050951590621E-8+6.5989012451699485E-9i 4.2551433118651526E-8-1.93695145368535E-8i 1.7574228013817843E-5-4.590792560275429E-6i -9.029076054180972E-5 1.614820526004245E-4 3.3701540779513456E-6 -9.492829602638879E-7+2.699278303534474E-7i -3.0449200092307406E-6+7.291814236903722E-7i 1.759142906622701E-5-4.61510095009753E-6i -9.243271779797385E-5 1.6137020948982976E-4 0 5.750354831160041E-8-2.210489110578933E-9i 1.552581922757899E-7-4.384250305756414E-8i 1.9041063393677856E-5-4.968417792374031E-6i -9.341963560452621E-5 1.584702185253917E-4 4.572863304989268E-6 -1.6517443845218139E-6+4.6770545163860033E-7i -6.433322699631733E-6+1.5287593437022148E-6i 2.0286611223458767E-5-5.334443473981018E-6i -1.2198011671243474E-4 1.4828460392534454E-4 6.02795046528943E-6 -2.9565775808771142E-6+9.361742808149704E-7i -2.8187401323388475E-5+7.600682278104099E-6i 2.012887285554608E-5-5.900187414919425E-6i -1.3538010018123415E-4 1.486429525806705E-4 3.0940680108084688E-6 -1.0103228901917023E-6+3.4800346074860083E-7i -3.4493344561380347E-5+9.316341456936656E-6i 2.3718246401870477E-5-7.060382329797349E-6i -1.277641825681248E-4 1.4694721697292953E-4 3.44931260540734E-6 -2.3626614184074943E-6+7.675831993587216E-7i -3.376732926565991E-5+9.199241063252846E-6i 2.0535379274660173E-5-6.211718268298136E-6i -1.1316974668940792E-4 1.496632457934636E-4 5.60596652109194E-6 -3.4921561467715786E-6+1.072286981357602E-6i -2.456404098088251E-5+6.417881269573907E-6i 2.1345340479147026E-5-6.145079558797853E-6i -1.1158451950693098E-4 1.4370601037156557E-4 4.009820773522147E-6 -5.9691042974841665E-6+1.838926112526842E-6i -2.923788047913325E-5+7.949996681656685E-6i 1.5773108972029232E-5-4.9444895029284244E-6i -1.1058983969503188E-4 1.3949831824913448E-4 7.500000000000002E-8 -8.18169950731612E-6+2.5607479323758176E-6i -3.2589612458074066E-5+9.154580173886817E-6i 1.2714918597172392E-5-4.381963478967956E-6i -1.0571404518897872E-4 1.4138871781757122E-4 7.500000000000001E-8 -8.104205587090221E-6+2.4658861...
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This document was uploaded on 01/24/2014.

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