H_75nm_L1_65um_D_4um

8193760806766785e 4 43269759459005025e 6

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Unformatted text preview: 235463E-9i 4.8977334676109464E-8+2.073769055956657E-8i 1.5086067792082045E-6-1.529683044521746E-7i 1.552479395711445E-4 1.5499999999999995E-4 7.500000000000001E-8 2.1045247390010554E-11-5.200341302421688E-9i -1.0253592559807734E-7-1.390888811126642E-7i 1.8509688874981325E-6-2.2402469821085435E-9i 1.54893766246737E-4 1.5602152455005582E-4 1.4591454797317806E-7 2.2919957051422205E-8+1.2998915656543819E-8i -4.174536878439727E-8-1.5491735849953307E-8i 1.6260132258138343E-6-8.479094150520534E-8i 1.544297625400287E-4 1.5455448456315793E-4 9.963261649586358E-7 -1.3386033905811315E-8-2.0996415534273344E-9i -3.061648528537679E-7-1.6164328299405826E-7i 1.6579282347967996E-6-1.1750575104199981E-7i 1.562049672962453E-4 1.5357071458189592E-4 7.500000000000001E-8 -2.6709814541071104E-9-4.667189389102557E-9i -4.921952889665288E-7-2.33952111577337E-7i 1.549366463584289E-6-1.6487158965133955E-7i 1.5449934025635524E-4 1.5301084583195575E-4 7.500000000000001E-8 -3.016567433975694E-9-5.0404851157824885E-9i -5.30350087704571E-7-2.4417351248320263E-7i 1.480559292727699E-6-2.0471723048161426E-7i 1.4832486495078206E-4 1.5499999999999992E-4 7.5E-8 5.138212136765058E-9+8.380105765191801E-10i -1.2974616288757555E-7-1.3335370866023602E-7i 1.9339142607598198E-6-1.0984739194994894E-8i 1.517773305249087E-4 1.5499999999999992E-4 0 -1.023561129950834E-9+3.3393768653078304E-11i -7.445177314629409E-8-2.7860314239076383E-8i 1.9003127073926869E-6+4.255804994708363E-8i 1.500490348527053E-4 1.5499999999999995E-4 0 1.8554217077390116E-8+4.45022053814174E-9i -6.707449343832693E-8-3.0159539121067586E-8i 1.9179343597995823E-6+4.2460835173757416E-8i 1.5005761106911113E-4 1.5499999999999995E-4 7.500000000000002E-8 -3.305133467838376E-9-5.9651996166717085E-9i -8.476260353119447E-8-1.3721025149756582E-7i 1.951001926363448E-6+9.132191993957029E-9i 1.5094168269824906E-4 1.564088653375026E-4 0 5.182293462546941E-9-2.3997420000662415E-9i -1.0012552592586488E-10+5.338394316077684E-9i 1.5998247759164724E-6-1.3515720712046056E-7i 1.4961553453508852E-4 1.559541054587219E-4 1.1425656003643273E-7 2.0602357577326896E-8+1.1888117172858918E-8i -7.574025814773705E-8-2.669562401648104E-8i 1.7056496075670431E-6-8.454826699805316E-8i 1.517903697612773E-4 1.5499999999999995E-4 7.5E-8 -2.971554790534743E-9-3.5308838559119232E-9i -1.4578706432281164E-7-1.405935784709128E-7i 1.8924113561247849E-6-7.858912148683597E-9i 1.5269388612347676E-4 1.5352152174615233E-4 7.500000000000001E-8 -1.0488877049893985E-8-7.786319570162787E-9i -5.542725038583258E-7-2.550775082367128E-7i 1.6012729944032833E-6-1.7083874862146969E-7i 1.528583954703575E-4 1.5550215149470715E-4 9.514577979305213E-7 -1.3699374226018348E-8-2.181214581494182E-9i -1.5057207944138842E-7-9.148967772825763E-8i 1.659204159147961E-6-1.0345556085668399E-7i 1.258105251858134E-4 -5.0E-6 7.500000000000002E-8 -7.681873772453964E-9-4.0638472879784205E-9i -1.1463379950779791E-7-1.49380869081132E-7i 3.7056534645915645E-6-1.7496889123357324E-7i 1.2513303682080062E-4 -4....
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This document was uploaded on 01/24/2014.

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