H_75nm_L1_65um_D_4um

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Unformatted text preview: 720774E-8i 1.1056549097695768E-7-2.8947730073367597E-8i 1.5698378476980046E-8-3.5610617970515952E-9i -7.070668959038222E-4 1.7179743692809205E-4 1.7333795136054698E-4 1.2906291511812336E-7-3.369584439036787E-8i -3.844906650011899E-8+1.0114623197746105E-8i 1.281260846990841E-7-3.279888886265151E-8i -7.037231061529083E-4 2.2252126248457953E-4 1.2149929056900271E-4 9.115937456901721E-8-2.3848892380244184E-8i -3.531025837352701E-8+9.329389514988927E-9i 1.4794290993956516E-7-3.8006451170711296E-8i -6.793012898776335E-4 2.4086162463272373E-4 2.0009856408747162E-4 1.3579666238433628E-7-3.540706335016529E-8i -6.01192665335134E-8+1.5795733450702945E-8i 1.1128859012780435E-7-2.8442590658583837E-8i -6.449902008404604E-4 1.8415850868437223E-4 1.4767752667580093E-4 1.6657638019132862E-7-4.352293539698391E-8i -6.191578281517355E-8+1.6283660363121826E-8i 1.7951833010119154E-7-4.607954110882353E-8i -7.206498099285449E-4 1.630457564684128E-4 1.1655012976224048E-4 9.184190675294005E-8-2.404706168502856E-8i -2.3544325709465085E-8+6.229791261450853E-9i 1.506939344689917E-7-3.869276495783573E-8i -6.800970952984523E-4 2.84052284337651E-4 1.276175565083816E-4 8.443633837514667E-8-2.2075718363916414E-8i -4.594694724771292E-8+1.213195339469511E-8i 1.4253405368948871E-7-3.663945000365227E-8i -6.837088625730508E-4 1.8221163009859008E-4 2.4258011686014062E-4 1.6908513311605232E-7-4.404424262574109E-8i -5.655078830595954E-8+1.4829733681313934E-8i 8.68362994471197E-8-2.202904022595732E-8i 3.3767172755976027E-4 1.18929317356772E-6 5.525320738155321E-4 -1.5080113952462982E-7+3.9197881156178764E-8i -1.3066164346525315E-10+3.819296345311396E-11i -7.536980191677981E-8+1.86959097045734E-8i 2.5120859372457016E-4 -6.656837851839447E-5 7.014035168291895E-4 -9.365023964978657E-8+2.460494354154393E-8i 1.605661686947766E-8-4.121196314177514E-9i -9.59495852980063E-8+2.4407295178106173E-8i 2.862454151184915E-4 0 6.910626210411853E-4 -9.739753017859593E-8+2.5528501105983627E-8i 9.449538926267795E-11-2.5375550914545507E-11i -8.70645292401444E-8+2.207516968254862E-8i 2.2235473741081903E-4 -6.170776985619678E-6 6.546454922540314E-4 -1.1707515328049145E-7+3.0750904654273584E-8i 2.006757661230157E-9-5.174703739055588E-10i -1.2290615733233083E-7+3.1265793051002766E-8i 3.526008564185508E-4 0 6.596791914090412E-4 -1.0119941323730885E-7+2.641271994213832E-8i 8.998198128786134E-11-2.3265485917963525E-11i -6.636778331213767E-8+1.6672279525489898E-8i 3.03516162588084E-4 1.0888506793537603E-5 6.22263586304342E-4 -1.2384789629587483E-7+3.234250915779386E-8i -3.6612517539888354E-9+9.349672966257784E-10i -8.856262287328683E-8+2.2296602667054348E-8i 2.1680641541542666E-4 -8.662926656416027E-5 6.513371969007002E-4 -1.1448639529874791E-7+3.009122443655436E-8i 2.859087547410971E-8-7.3363869306553445E-9i -1.2057606257472312E-7+3.067959120886318E-8i 2.384674709365473E-4 -1.9549247550956767E-4 6.814836442089185E-4 -8.835389407448095E-8+2.32434408323669E-8i 4.628684655468762E-8-1.1887821113470917E-8i -8.74393095840479E-8+2...
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This document was uploaded on 01/24/2014.

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