H_75nm_L1_65um_D_4um

835426136250473e 7 1895558880873948e 7i

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Unformatted text preview: .92173559843134E-8+1.1905979600746525E-8i 4.220788260439941E-7+1.8006471824936568E-7i 1.4178537994090386E-6-4.9731644844368E-7i 1.3219894752099424E-4 1.409931459077842E-4 -3.6782494515432714E-6 6.847661920240021E-8-4.936965311778879E-9i 4.134180850263671E-7+1.5940099810131346E-7i 1.4558963759207468E-6-4.4674391966111776E-7i 1.3588204765604487E-4 1.40619383921087E-4 -4.8243421870450795E-6 8.832009286694324E-8-6.325799653197776E-9i 3.9652013082301835E-7+1.4667512130825053E-7i 1.4101038215418547E-6-4.308842814190793E-7i 1.2370578337943694E-4 1.396978466217322E-4 0 1.141369797376535E-9+4.61346621305871E-9i 4.4062668389426094E-7+1.909506606486245E-7i 1.5304493209928384E-6-5.161384616521021E-7i 1.245162798111656E-4 1.4314211444626406E-4 -3.5632712183604157E-6 5.5332317750512736E-8-1.2011151330242364E-8i 4.2937992419632756E-7+1.6738702043014584E-7i 1.5822871938620437E-6-4.601065340449504E-7i 1.2465643364484443E-4 1.3832145122511072E-4 -2.4514446048799334E-6 3.993753894766678E-8-6.1598743325719215E-9i 4.122878650434884E-7+1.6299109616519131E-7i 1.5323211858293732E-6-5.106779869649348E-7i 1.0900660091279297E-4 1.482498731947564E-4 0 -1.8185105306304525E-8-6.519763153060804E-9i 4.997363507861554E-7+2.3202774666535708E-7i 1.8744887719248965E-6-4.811693435634525E-7i 1.066960764947046E-4 1.4546288716086475E-4 0 -3.374089180699716E-8-1.1901183552629619E-8i 4.6433535711559446E-7+2.126973444657753E-7i 1.8614416157869749E-6-5.404364212820561E-7i 1.0689508695031355E-4 1.47857152657095E-4 -2.845478402012026E-6 2.3425006413681503E-8-2.4604694953622474E-8i 4.3141690133127037E-7+1.762141654525409E-7i 1.9206271550215276E-6-4.861800431653712E-7i 1.0274912853358546E-4 1.473777769885249E-4 -2.5619397386481737E-6 9.632139988807019E-9-2.865241479515536E-8i 4.217627034029001E-7+1.736037599314317E-7i 1.9845252206946045E-6-5.178118515070367E-7i 1.014582688422242E-4 1.44932615372904E-4 0 -5.2368949184164905E-8-1.9765345588129994E-8i 4.335781433953424E-7+1.9984108529397834E-7i 1.9493604208323673E-6-5.784943007765087E-7i 7.312008965554128E-5 1.345947766925982E-4 -2.436124861234491E-6 -2.484553966842361E-7-1.8045648880812934E-7i 1.2342397643347792E-7+1.6858567999396033E-8i 3.0275892005508906E-6-7.353067548880578E-7i 7.584767184938077E-5 1.3466677839053977E-4 0 -3.9417727055221714E-7-1.8380644148329853E-7i 1.0076138918803167E-7+4.656862740243608E-8i 2.8156276149345884E-6-7.76245084896593E-7i 1.8989614393097274E-4 6.494958181519549E-5 -5.518106823489369E-6 3.204707187797315E-7+1.001643659253695E-7i -1.2395259079304028E-8-2.6251601439910318E-9i 9.855152008586528E-7-3.7881454081938414E-7i 1.847759955929999E-4 6.443772708449848E-5 0 2.7895935166234893E-7+1.222722635475665E-7i -3.5057850188429004E-8-2.7346112039302456E-10i 9.727213405742067E-7-4.2463014146857396E-7i 1.8598528116333288E-4 5.750784897493829E-5 -7.669458076256345E-6 3.168050760719605E-7+7.924128451169438E-8i -3.410473350484245E-8-1.1839264841329326E-8i 1.0392014156816679E-6-3.990799523622505E-7i 1.7975107391243023E-4 5.8409052112094224E-5 0 2.532...
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This document was uploaded on 01/24/2014.

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