H_75nm_L1_65um_D_4um

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Unformatted text preview: 1.4377010561893328E-7i 2.2735447410869944E-4 -1.0071758895387387E-4 -6.53580983591158E-6 9.969247493048884E-8+1.2635996436352825E-8i -1.856134345593349E-8-5.964827672826667E-11i 8.909202055668747E-7-1.4730923848275995E-7i 2.3083857674134135E-4 9.203989011296666E-5 -3.2613146001291665E-5 2.618305210355085E-7-2.4181872206419554E-8i 6.194446077128915E-8-7.636070195822649E-9i 7.621843463729072E-7-1.8294351297729868E-7i 2.3417064426531443E-4 8.156955984604828E-5 -3.034120707204546E-5 2.4526083748593203E-7-2.151338711080618E-8i 4.796042066404468E-8-7.095395892528146E-9i 7.682173465213607E-7-1.7907914061741117E-7i 2.3227412557054122E-4 1.709445905090718E-5 -8.458966598954085E-6 9.165303411140931E-8+3.867107484738621E-9i -9.559381718944817E-10+3.440685049564599E-10i 9.140537023405726E-7-1.691462038605108E-7i 2.418539235377546E-4 6.770168241882396E-6 -1.2749084327965905E-5 1.0530188638501641E-7-7.379582553670158E-9i 4.815511393849289E-10-1.388354491611178E-10i 8.238326503890368E-7-1.6958628973826996E-7i 2.3637493962628262E-4 9.11823195386839E-6 -8.265856667595854E-6 7.88607100863573E-8-3.1969920952138155E-10i -8.744279435766008E-11+3.3703843535515254E-10i 8.766729540718678E-7-1.6872416613890376E-7i 2.392787547221887E-4 1.5819103026901652E-5 -1.1082646749090113E-5 9.833048821102949E-8-4.660522274747193E-9i 8.235001887456387E-10-3.6649067320944504E-10i 8.463081795182081E-7-1.6984707023278714E-7i 2.4065226233300542E-4 2.777346882693353E-5 -3.0757283572894235E-5 2.3601937264034938E-7-2.9293389807356423E-8i 1.1039599164076024E-8-3.722791740747244E-9i 7.817014545022992E-7-1.795044800325103E-7i 2.429212487267274E-4 2.2581912035855986E-5 -2.300178935025579E-5 1.7834545488925498E-7-1.9189361904574026E-8i 5.955853491444572E-9-2.1527811204822634E-9i 7.90265144588818E-7-1.7355817925372145E-7i 2.508200488893687E-4 1.6929806338922343E-5 -3.259030261695665E-5 2.154030252578859E-7-3.3048200451205395E-8i 7.093160290989056E-9-1.988365558450055E-9i 7.197402060957357E-7-1.6636774211374638E-7i 2.355321336731232E-4 7.022212465310223E-5 -2.511519286077138E-5 2.1571285574218414E-7-1.448006604436758E-8i 3.224065094311851E-8-5.7370148971235945E-9i 7.940376898056645E-7-1.7683333424360106E-7i 2.3123182209156898E-4 6.052534758511887E-5 -2.3854120842459414E-5 2.2988905955789585E-7-9.415889016411056E-9i 2.5460148782923785E-8-5.891575403321853E-9i 8.36999089228231E-7-1.852638608632218E-7i 2.3682010713320156E-4 5.673243861278188E-5 -3.737279921315665E-5 2.865708830360016E-7-3.641013942593089E-8i 3.589967884482767E-8-8.070441769580047E-9i 7.60692625366204E-7-1.8304558150009614E-7i 2.311889740228741E-4 6.84935012279031E-5 -4.2370693725173344E-5 3.301452650228512E-7-4.427674390704685E-8i 5.4967822153515427E-8-1.0681426759178778E-8i 7.608667253694154E-7-1.9051074003649038E-7i 2.3490240058415612E-4 5.207061088604409E-5 -4.455620968071163E-5 3.348341943563861E-7-4.992137769967818E-8i 3.9650339894192115E-8-9.374027223032823E-9i 7.524838958141524E-7-1.8716302636628532E-7i 2.3755588961509844E-4 4.197437249677031...
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This document was uploaded on 01/24/2014.

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