H_75nm_L1_65um_D_4um

86328177945845e 8i 1950329080389746e

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Unformatted text preview: 30284E-18-3.7292768835715223E-19i -1.4682093462649974E-4 7.25593827542488E-4 1.0705704361527566E-4 1.3448843451143555E-9-1.8783405606178284E-10i -4.186447071201706E-8+1.0911087899596194E-8i 8.09090718036715E-8-2.1046296472707297E-8i -1.494904061651634E-4 7.387864425887151E-4 1.0900353531737161E-4 7.890656363877661E-10-1.7701893488785024E-10i -6.018141486462417E-9+1.5667092999785273E-9i 1.1915051283610999E-8-3.0836495823143144E-9i -1.1246945551481822E-4 7.37725551976274E-4 5.114324527737571E-5 -9.778422369889924E-11+1.475483156759875E-10i -1.940412277909493E-8+5.0429310449359105E-9i 8.458215790752869E-8-2.2012608008920862E-8i -7.332003104138756E-5 7.443978591322987E-4 0 -7.531429234428581E-10+2.796404483160172E-10i 2.8222162004236242E-9-7.596709578655884E-10i 8.329227233164789E-8-2.1684335452631158E-8i -1.1451435470599672E-4 7.51138743830388E-4 5.207312246423713E-5 1.903641773152189E-10-2.95955745160598E-11i -2.7792114806906238E-9+7.23300755324333E-10i 1.2399300385340092E-8-3.213943552789635E-9i -7.465312251486738E-5 7.579323656619766E-4 0 4.9129979662783393E-11-5.707964937265579E-13i -3.864132637247247E-10+1.007968270212067E-10i 1.2478064081561855E-8-3.239035646644686E-9i -5.1721617755695375E-5 7.447598518972275E-4 4.649341091760778E-5 -2.0936959418632206E-9+6.589387555800299E-10i -1.6772489144748663E-8+4.3343476221622466E-9i 8.259842863822313E-8-2.1508320269768144E-8i 0 7.479999999999999E-4 0 1.3465119116313043E-10+3.635546526494222E-11i 3.4120570830911513E-9-9.344542783088806E-10i 7.819932268827679E-8-2.0368058982503677E-8i -5.266201080579896E-5 7.583009401135407E-4 4.73387456615643E-5 2.6786226288034608E-11+1.1731728992552191E-11i -2.416153202714059E-9+6.259902515226899E-10i 1.207510235808694E-8-3.136733572093256E-9i -2.5938688710823864E-20 7.615999999999999E-4 0 -5.4184419196758795E-11+2.6133705770235048E-11i -3.8255580542805624E-10+9.667341337671701E-11i 1.2304218576665093E-8-3.2021925194291082E-9i -1.1655925389717524E-4 7.645519356845022E-4 5.300299965109855E-5 4.3301604506694076E-11-7.05424151062E-12i -4.6291255992208205E-10+1.206393007789699E-10i 2.1197365522397595E-9-5.473798360638871E-10i -7.598621398834728E-5 7.714668721916547E-4 0 2.208206285974212E-12+1.494994319946814E-12i -4.33089535515036E-11+1.1582377483493631E-11i 2.142471136053536E-9-5.548055855926496E-10i -1.1860415308835375E-4 7.779651275386163E-4 5.393287683795998E-5 7.795861298429696E-12-1.1547452128714824E-12i -6.83773700747018E-11+1.783104995516468E-11i 3.133661837072281E-10-8.033959463379221E-11i -7.731930546182696E-5 7.850013787213327E-4 0 2.8803957071959737E-13+2.3038656503093677E-13i -4.735432131649437E-12+1.2688498176344218E-12i 3.177667317039909E-10-8.191943648982147E-11i -1.2064905227953227E-4 7.913783193927304E-4 5.48627540248214E-5 6.345215342978665E-13-5.998813133721024E-14i -4.905497963493429E-12+1.274498788031883E-12i 2.0849126259228672E-11-5.239588254811864E-12i -1.2269395147071079E-4 8.047915112468445E-4 5.579263121168283E-5 -2.91597828851002E-20+5.166177807312503E-20i -2.910...
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This document was uploaded on 01/24/2014.

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