H_75nm_L1_65um_D_4um

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Unformatted text preview: 12438E-9i -7.322139396886254E-9+1.901186513457431E-9i -2.0430361624391175E-8+5.356047925202985E-9i -4.3073619797541664E-4 -1.4204209060652664E-4 -6.619185238757181E-4 -3.3556363982198814E-11+7.668179319106882E-12i -1.1397994240772066E-11+2.9653599968245576E-12i -3.249245362523799E-11+9.062422660474582E-12i -4.3803681150042376E-4 -1.4444958366765422E-4 -6.731374819075099E-4 -6.174632482294085E-19-3.2445250018997197E-19i -3.196350996204579E-19+7.933770026694556E-20i 4.861500227303267E-19+2.0341217635673084E-19i -5.452722002898798E-4 -4.4834460338115183E-4 -2.473243704329001E-4 -9.991327514162409E-8+2.5913015649485336E-8i -1.0317356078665337E-7+2.6828541977708526E-8i 6.118192594630672E-8-1.5683950158699743E-8i -5.551862402951504E-4 -4.564963234426273E-4 -2.5182117716804374E-4 -1.2177719765023806E-8+3.124295547345724E-9i -1.0945575263136035E-8+2.8350292487316394E-9i 8.395188646958338E-9-2.110824532566581E-9i -5.84928360310962E-4 -4.809514836270538E-4 -2.6531159737347464E-4 -1.8371481771623378E-11+4.322645596683179E-12i -1.5584393726128105E-11+4.003262288835911E-12i 1.2427609846095542E-11-2.330262701939785E-12i -5.948424003162326E-4 -4.891032036885293E-4 -2.6980840410861833E-4 -4.13978361938405E-19-9.757201217873771E-20i -4.672764615893699E-19+1.164310225051513E-19i 1.6517837703034868E-18+5.91156028812236E-22i -5.865300535098166E-4 -3.946215366419089E-4 -2.4445927912057223E-4 -1.1521234078347677E-7+2.987113823515642E-8i -9.543681137136733E-8+2.479412904639104E-8i 6.358787140303024E-8-1.6279891536434485E-8i -5.971942363009042E-4 -4.017964736717618E-4 -2.4890399328640086E-4 -1.3361418863851656E-8+3.4293308538715887E-9i -9.733233774572731E-9+2.5200409005642064E-9i 8.54448796242351E-9-2.1422899127223398E-9i -6.29186784674167E-4 -4.2332128476132053E-4 -2.622381357838866E-4 -1.9545370637900187E-11+4.618496726656467E-12i -1.3510400898866505E-11+3.467683700201263E-12i 1.2604319029014867E-11-2.302117564452814E-12i -6.398509674652546E-4 -4.3049622179117336E-4 -2.666828499497152E-4 -4.565361687523117E-19-8.549246212271603E-20i -4.1200446753033966E-19+1.0084987999056807E-19i 1.6256124178006108E-18+3.924101319104653E-20i -6.230973255094248E-4 -2.4595324956155933E-4 -3.3280733461435474E-4 -1.7692984472731275E-7+4.5821457925173914E-8i -8.466948253256266E-8+2.1989887071315715E-8i 1.0041967679386053E-8-2.293711767655487E-9i -6.344263677914143E-4 -2.5042512682631494E-4 -3.388583770618885E-4 -1.982008545327313E-8+5.090639995121702E-9i -8.429840280919453E-9+2.185547215542176E-9i 3.3960056140520826E-9-7.97437509716681E-10i -6.224292970913641E-4 -2.9528998719588744E-4 -2.913581877761505E-4 -1.5566649594652057E-7+4.0328559901030515E-8i -9.000071712153896E-8+2.337102132829156E-8i 3.7945881597540504E-8-9.56309095090251E-9i -6.337461934021162E-4 -3.0065889605399455E-4 -2.966556093720805E-4 -1.7143654001357215E-8+4.402058566761805E-9i -8.728458045269252E-9+2.261516267516802E-9i 6.041323820967432E-9-1.4852732098708256E-9i -6.684134946373829E-4 -2.6384075862058177E-4 -3.570115044044...
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This document was uploaded on 01/24/2014.

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