H_75nm_L1_65um_D_4um

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Unformatted text preview: 61617536361284E-8i 1.4995003624134381E-7-2.4839946814801102E-8i 6.917167833038076E-7-1.7353871546484975E-7i 2.2944647146270287E-4 -2.1384198940413082E-4 4.7580456095193685E-5 -1.5845849246293872E-7+3.726436174810577E-8i 9.905643763937829E-8-1.9461001195777592E-8i 5.16865856727753E-7-1.2936862755494806E-7i 2.4432946815967904E-4 -8.86810368473396E-5 4.2957317969773764E-5 -2.626027905264361E-7+3.888770198830827E-8i 6.02000616746184E-8-9.570781493262046E-9i 6.714217362553259E-7-1.6539518890127805E-7i 2.7122584489062794E-4 -7.133360310081057E-5 7.237683415959396E-5 -3.047596093979774E-7+6.410751067410088E-8i 5.532768260704361E-8-1.1374837438774606E-8i 5.041038464756818E-7-1.281147473803848E-7i 2.225732857029605E-4 -7.633590189197565E-5 4.756952630935532E-5 -3.849864423144392E-7+5.291922698579491E-8i 7.750755470711705E-8-1.3476677724227057E-8i 7.754590704968167E-7-2.0646501396453326E-7i 2.089459222847303E-4 -1.0616210696060226E-4 5.860744368074507E-5 -4.5156955005243396E-7+7.94835487227113E-8i 1.4773554012741363E-7-2.097837107303267E-8i 7.581488541451841E-7-2.125294785613969E-7i 1.849134531033961E-4 -1.2832547564853465E-4 3.677636509193076E-5 -3.675471690949942E-7+4.9782727804581183E-8i 1.9646879858746348E-7+4.046203194483881E-10i 9.185010136073389E-7-2.7269157383729003E-7i 3.062097015329418E-4 8.622799211567127E-5 5.700722803711758E-5 -1.7091894230799648E-7+3.655862178974462E-8i -3.355892913643397E-8+6.832993913986559E-9i 4.207061946831108E-7-1.0432685980023109E-7i 2.886740460453594E-4 3.07861605273768E-5 5.0553087253135546E-5 -1.9991788426761692E-7+3.98943527004081E-8i -1.4173729471955995E-8+3.069596823791987E-9i 5.088181345439956E-7-1.2429315805569692E-7i 3.418617397640252E-4 2.1366512346544342E-5 7.205479043295832E-5 -1.6430839542919768E-7+3.7207958096762024E-8i -8.709388866276686E-9+1.9104317367049052E-9i 3.410511041737027E-7-8.549271148600574E-8i 4.0183180924071313E-4 1.1275326467039764E-4 7.287727412507363E-5 -9.389880951806288E-8+2.239505501006634E-8i -1.9844981959138073E-8+4.497291995559092E-9i 2.2295051865058295E-7-5.667481946815453E-8i 4.8764423471972745E-4 4.9749309877423574E-5 1.5836027160567891E-4 -1.1014024948870709E-7+2.7300094646859553E-8i -8.85674456566204E-9+2.1173667949827003E-9i 1.216458317328986E-7-3.161762997054756E-8i 6.009247184042458E-5 1.3521350840174244E-4 1.3921689035051234E-5 -4.4760565352873933E-7+1.6261420784722595E-7i -4.0440537274268193E-7+7.552680193738086E-8i 3.370267786117606E-6-8.282213679637631E-7i 6.335644037289689E-5 1.4616043996483843E-4 1.1328095716022862E-5 -2.944878323232574E-7+1.1560718268354157E-7i -2.9879962501819704E-7+4.549865207240989E-8i 3.006016809783225E-6-7.354101347028911E-7i 5.8080067245659656E-5 1.5590318442446253E-4 1.3864016478980047E-5 -3.746764472195798E-7+1.1407434269496547E-7i -3.473805648794525E-7+6.822474521838929E-8i 2.89575894863654E-6-7.21984446321901E-7i 7.199311398409288E-5 1.4659883511270618E-4 1.57581284146523E-5 -3.5550618278292357E-7+1.4516397637207712E-7i -3.8114401949921105E-7+4.46742153...
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This document was uploaded on 01/24/2014.

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