H_75nm_L1_65um_D_4um

908837774441013e 8 17799118998350474e 7i

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Unformatted text preview: 28821106E-5 3.434209877419971E-7-8.748298912863935E-8i 2.4739258055505204E-7-5.700019215950001E-8i 5.364666752509335E-7-1.3804654336953247E-7i 1.1405855947631505E-4 -2.247836343194389E-4 -1.8547791293634737E-4 6.75239604391349E-7-1.7723367320304183E-7i -6.119389013527534E-7+1.5427656647883462E-7i 1.7544322187908928E-7-4.7733760848936454E-8i 2.5109271591631144E-4 -5.424520872466438E-4 -4.4966896830393954E-4 6.082418656309806E-8-1.5980854364839006E-8i -8.521984764089273E-8+2.198453656951643E-8i 4.06733397827883E-9-1.220475361324026E-9i 1.9041298313832332E-4 -5.788201425696625E-4 -4.3383653420153516E-4 5.2851367913602374E-8-1.393757120543734E-8i -9.418699441827284E-8+2.4342475334465302E-8i 6.5526314320446965E-9-1.8311028285448495E-9i 2.4855750516344086E-4 -5.875206797494007E-4 -3.9056704609289293E-4 5.253389771986596E-8-1.3805397651822825E-8i -7.992243497438011E-8+2.0635134561364203E-8i 2.1318588031034928E-8-5.664355251708597E-9i 1.8760894019840836E-4 -4.935155543703461E-4 -3.96936890074046E-4 8.370669329472517E-8-2.202861199711122E-8i -1.2812975783430828E-7+3.305629457846115E-8i 5.354749284438199E-9-1.5893370442543107E-9i 1.875185660347207E-4 -6.209729223630642E-4 -3.724693505298892E-4 4.5479660250834386E-8-1.1990370748298868E-8i -8.754791612627212E-8+2.26479160942309E-8i 2.5321809465164126E-8-6.675916262626209E-9i 1.9035727039311946E-4 -5.332508454305771E-4 -4.887858891744479E-4 5.958142596448284E-8-1.571335213351164E-8i -9.685463424426712E-8+2.501765057472901E-8i -1.1704979964285969E-8+2.8802087378903347E-9i 1.275403787326614E-4 -5.680117859833195E-4 -4.69680809461882E-4 4.943551097136535E-8-1.3099237842426833E-8i -1.0588350108270051E-7+2.7402478776792422E-8i -8.087043654172916E-9+1.9860898904421667E-9i 1.2755417021925245E-4 -6.115564702138367E-4 -4.113789219190383E-4 4.302456917473155E-8-1.1398189670953845E-8i -1.0045946230292218E-7+2.601669232430375E-8i 1.3257404194416515E-8-3.5346015579009515E-9i 0 -6.219421024488396E-4 -4.1556229459179124E-4 2.6801419727881826E-8-7.221846014819698E-9i -1.2104318307182822E-7+3.142987763588382E-8i 8.546071034285295E-9-2.2510316268101958E-9i -6.481182308028088E-5 -5.984191217162153E-4 -4.440697944618661E-4 1.6957148251359474E-8-4.6929969962561575E-9i -1.334161652416795E-7+3.4671365272767096E-8i -5.89447744034274E-9+1.5387046314783078E-9i -6.534290896759025E-5 -6.38535501143462E-4 -3.840660334201929E-4 1.4552570167300659E-8-4.020338181982378E-9i -1.2524419528099738E-7+3.256705217468851E-8i 1.9461304092738612E-8-5.054559886966222E-9i -5.752081924391067E-5 -5.850542998849895E-4 -3.8965286558969296E-4 2.1382091219923123E-8-5.868584827214539E-9i -1.5440714232733797E-7+4.0143491751237186E-8i 8.387833730190028E-9-2.169132901091649E-9i -1.2823650873051921E-4 -6.492618106154203E-4 -3.485950359729661E-4 1.7726661579109542E-9-6.602890529863334E-10i -1.241588054499769E-7+3.2321610463502455E-8i 3.177661796338474E-8-8.23036228451583E-9i -6.50724903234497E-5 -6.733470755777482E-4 -3.191759496171329E-4 1.1547747293705401E-8-3.181306818012704E-9i -1.0910...
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