H_75nm_L1_65um_D_4um

941550529911854e 413236819262077703e 4i

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Unformatted text preview: E-4 0 3.489689346997636E-5-7.681993515817337E-6i 1.9774411411678052E-6-5.201653084073906E-7i 4.0590601592090796E-5-1.1150022200284119E-5i -6.765193037039686E-5 1.2315601791100503E-4 0 -4.1730488893983494E-7+7.776845012408273E-8i -1.3093058596415192E-8-2.1278279607112145E-8i 4.3593039288815075E-5-1.0986075394260323E-5i -6.721112146377668E-5 1.249826876983119E-4 0 -2.7756376937423114E-7+5.3625468190427395E-8i 3.023404642124352E-8-2.7921177750643105E-8i 3.725961116573968E-5-9.523111837714723E-6i -6.741574583483097E-5 1.251549197913263E-4 -1.3710724523725576E-6 6.119712918427796E-6-1.3924638501340569E-6i 1.4095492941514424E-6-3.9364429583824597E-7i 3.7006935264224015E-5-9.465476316704996E-6i -6.7204776118599E-5 1.267448543972769E-4 0 -5.003728993827062E-7+9.813388415942648E-8i 2.8806794896175934E-8-2.6951783157515285E-8i 3.6381292722775885E-5-9.236608852546743E-6i -6.535355397797486E-5 1.2600165052780696E-4 0 -8.136689064706937E-8+1.686478415391379E-8i 1.0857653073501061E-8-2.2207532635043493E-8i 3.1579282733731945E-5-8.14570840797029E-6i -6.537636850139112E-5 1.232931163985772E-4 0 2.5727888892516735E-8-9.165383617897606E-9i 4.906730048943244E-8-3.127305668435503E-8i 3.366880889556838E-5-8.710423341283674E-6i -6.808202837401439E-5 1.1648548283727952E-4 -1.8959225444248116E-6 1.3286570028259633E-5-3.136225624160207E-6i 2.4495319982138545E-6-6.757739783435496E-7i 4.5588093567715836E-5-1.1846972143918569E-5i -6.98003151210334E-5 1.2153772289138984E-4 -1.7100576519347885E-6 2.1103460584550816E-5-4.7758315535842025E-6i 3.0452734722093516E-6-8.197045642421451E-7i 4.1336963515283176E-5-1.0857388976786746E-5i -6.899999999999997E-5 1.2053651681282998E-4 0 1.6629202001387327E-5-3.437543056354168E-6i 3.921778076084366E-7-1.1171085915565963E-7i 6.401400820844865E-5-1.5748482470052004E-5i -7.090445680141687E-5 1.1931109675001223E-4 0 3.743469852460629E-5-8.34769877850819E-6i 2.182744308630233E-6-5.734549292743529E-7i 4.2002306267839874E-5-1.1605333978320897E-5i -6.798716352579344E-5 1.2356388563151255E-4 -2.1695147909440947E-6 1.0713968812702673E-5-2.4632431151888623E-6i 2.516476616875457E-6-6.820074251983008E-7i 3.708726695971174E-5-9.602755032351215E-6i -6.779475030458898E-5 1.217233098627663E-4 -1.410939336720552E-6 8.569549184308763E-6-1.9661318150156837E-6i 1.5519205331290935E-6-4.395409336335501E-7i 4.1358727828151934E-5-1.0618405897525146E-5i -6.708339843837377E-5 1.2147221996868681E-4 0 -2.5428356105750006E-7+4.560446752455149E-8i 4.225895994247608E-8-3.139820620029488E-8i 4.0664248563248084E-5-1.0428784711719041E-5i -6.727754424381711E-5 1.197804686354498E-4 0 -1.5327675898073786E-7+2.8026181505177068E-8i 5.966995378127911E-8-3.5100396863646986E-8i 4.445741067782506E-5-1.1352771339549154E-5i -6.814512399702011E-5 1.1993289098027758E-4 -2.0558060353208792E-6 1.290924130389248E-5-3.008614876381424E-6i 2.5545700506922873E-6-7.010153465219608E-7i 4.097488612777786E-5-1.0654753017479946E-5i -6.715841505739372E-5 1.1840701035812284E-4 -1.652884620324225E-6 8.363077269506038E-6-1.97185778...
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