H_75nm_L1_65um_D_4um

9609604267290895e 4 8507578857900071e 6

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Unformatted text preview: i 1.299623609891781E-7+6.336855022347263E-8i 1.2731791418559177E-6-2.3711826082452356E-8i 1.909379105141948E-4 1.557851912467297E-4 -1.302884854928999E-6 1.8686140997404017E-8-2.1223153099993048E-10i 9.184696845922813E-8+3.340219384638647E-8i 1.1100050724718547E-6-1.1396551585840929E-7i 1.9325642665779066E-4 1.5499999999999995E-4 0 3.6527311633727246E-9-4.579491542922032E-10i 1.0223772992715152E-7+4.9504116943210887E-8i 1.255411526854978E-6-2.1742571467493386E-8i 1.9259212864143447E-4 1.5544999809564294E-4 -1.3588080621082972E-6 2.0599487349954184E-8+7.350760634828375E-10i 1.0496087015331168E-7+4.0887138843437E-8i 1.0894045412536779E-6-1.1569898296009383E-7i 1.94984722329994E-4 1.549999999999999E-4 0 1.38911782081888E-9-1.7712564611686926E-9i 1.0959009843467529E-7+5.3104407100648264E-8i 1.2160842621161206E-6-3.2515869956524634E-8i 1.9364291597677362E-4 1.5586542978762954E-4 -1.4802909943908045E-6 2.1304310233029136E-8+6.499758649271964E-10i 8.860629376358613E-8+3.1451049314640964E-8i 1.0634586307427773E-6-1.2313652264228646E-7i 2.0016960934660428E-4 1.5499999999999992E-4 0 1.9251611909811236E-9-9.31790134850799E-10i 9.444527575654983E-8+4.445507758871897E-8i 1.125729235881063E-6-4.857446134017124E-8i 1.9671301800219744E-4 1.5499999999999992E-4 0 3.09143950853683E-9-6.296740719439163E-10i 1.1108906471357367E-7+5.349409692866372E-8i 1.1882502873968153E-6-3.695312316384058E-8i 1.9508153864500915E-4 1.555649054405716E-4 -1.6577557874738864E-6 2.4193770170211596E-8+1.2145649287425267E-9i 1.0041127212529015E-7+3.801425323198788E-8i 1.046305992106534E-6-1.2432634291724477E-7i 1.9844131367440087E-4 1.5499999999999992E-4 0 2.917271371520591E-9-5.242077132615319E-10i 1.0717315822349541E-7+5.1085120560528476E-8i 1.162754107183898E-6-3.9963607510066085E-8i 1.9913915765028877E-4 1.5570650556476074E-4 -1.318353909062115E-6 1.944803992869927E-8+9.862400160323519E-10i 7.649672256174102E-8+2.6348856856473113E-8i 1.011724934145526E-6-1.1922500484228067E-7i 1.9705755666175E-4 1.5564619071820125E-4 -1.4669981967430752E-6 2.1225404894534138E-8+7.288527585469785E-10i 8.72883457863629E-8+3.1814759512497976E-8i 1.0327288808983138E-6-1.201350991002294E-7i 1.8237555378286668E-4 1.5538033369130556E-4 -1.8122675635199545E-6 2.531606355913891E-8-6.436425031805468E-10i 1.4521689389971448E-7+5.8946672447307445E-8i 1.190419633988497E-6-1.2478411755504488E-7i 1.8370331885940835E-4 1.5439042078769317E-4 -1.408068056346807E-6 2.412440628671926E-8+1.392454896011067E-9i 2.1282970101577102E-7+9.559291135153116E-8i 1.19670084752744E-6-1.177185707437376E-7i 1.8461494829677356E-4 1.5499999999999992E-4 0 1.7639583899501587E-9-1.3730466151439344E-9i 1.5445505250099581E-7+7.498712943273378E-8i 1.3751949961586821E-6-1.4665506156118122E-8i 1.8626493662655464E-4 1.559886528411187E-4 -1.3209302283950514E-6 1.807231586998394E-8-1.0054739162127276E-9i 9.036580751816383E-8+3.1831730189622126E-8i 1.158326795526178E-6-1.1619458131135136E-7i 1.828866526245701E-4 1.549999999999999E-4 0 8.581459707765471E-9+1.1507167...
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This document was uploaded on 01/24/2014.

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