H_75nm_L1_65um_D_4um

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Unformatted text preview: 3881919707E-4 -1.7147711996698797E-6 -1.0099909116638532E-6+2.9181948401698974E-7i 7.892917655438411E-6-1.778400889049877E-6i 2.9491564141022836E-5-7.63401879947028E-6i -1.8746082886655558E-4 1.5556143664609731E-4 -1.5983670922414324E-6 -9.727987058970321E-7+2.9025270409863133E-7i 1.0467246053958226E-5-2.3699523597965623E-6i 3.1511023942314836E-5-8.199617599584374E-6i -1.8775270545465692E-4 1.5470304180704566E-4 -8.180311331075389E-7 -7.753108555996757E-7+2.3247692317734936E-7i 1.6224196240239783E-5-3.5348216996626547E-6i 3.813231991254412E-5-9.783529759367637E-6i -1.9258471716225383E-4 1.5417740776365872E-4 -1.217626116309079E-6 -1.4378646923610822E-6+3.992916635152735E-7i 1.6092332446524493E-5-3.489118688021313E-6i 3.0052853471861445E-5-7.881983137502518E-6i -1.8916829191709458E-4 1.5448763461987984E-4 -1.2661811303223752E-6 -1.1222363786107108E-6+3.29036695086854E-7i 1.6128928828920002E-5-3.5730243144266317E-6i 3.279389974209026E-5-8.562624670845758E-6i -1.905833249541431E-4 1.538595644056221E-4 0 -8.796873445744702E-7+2.4170793985802315E-7i 2.5136798636476997E-5-5.378942417895901E-6i 3.382602464620136E-5-8.988183880768482E-6i -1.9068924259556464E-4 1.545796207616858E-4 -1.719669425354021E-6 -1.5708326429450005E-6+4.383735701356771E-7i 1.4029481325235349E-5-3.1279930281409574E-6i 2.9396403413053333E-5-7.736567983639923E-6i -1.923016453263781E-4 1.53164866168407E-4 0 -1.3478599613432618E-6+3.669619293661039E-7i 2.387422520604836E-5-5.159679373481474E-6i 2.7464391588301214E-5-7.620485448882417E-6i -1.9408029511856068E-4 1.5321990470187763E-4 0 -1.3353073930845334E-6+3.5949587594748717E-7i 2.260822924226383E-5-4.803407898414103E-6i 2.716951240765591E-5-7.48623377022161E-6i -1.8195982482020203E-4 1.5317796267724256E-4 0 -1.040342722691846E-6+3.062576386699221E-7i 3.126325490160111E-5-7.189371954004671E-6i 3.2796772535246036E-5-9.151478427788112E-6i -1.837269539778274E-4 1.5325252115204723E-4 0 -1.1342257044022474E-6+3.233677289930792E-7i 2.9790927352743927E-5-6.788740526864762E-6i 3.16106865072796E-5-8.826899959761647E-6i -1.8544470650968514E-4 1.5384459176496297E-4 0 -7.144354295399878E-7+2.0990360360291568E-7i 2.8167649786997714E-5-6.235081338098693E-6i 3.614061906028063E-5-9.70880268035386E-6i -1.8884494326174063E-4 1.5327410378245543E-4 0 -1.1459957100617053E-6+3.2603735013297014E-7i 2.708841738807728E-5-5.9704116279036E-6i 3.0039823218492697E-5-8.296551082673701E-6i -1.871177438168248E-4 1.5320266502152332E-4 0 -1.2938681510628954E-6+3.5956789219481833E-7i 2.7736470527732384E-5-6.202603261274938E-6i 3.06328248304518E-5-8.486106652212227E-6i -1.8642704252588277E-4 1.5440257918373476E-4 -1.6217482560784098E-6 -1.4004977432214997E-6+4.047593732411838E-7i 1.652966787978299E-5-3.7747345394172765E-6i 3.2190848050900746E-5-8.505217630039004E-6i -1.8518679074909608E-4 1.5460253653662708E-4 -1.813809333443734E-6 -1.4545255439809419E-6+4.1931215125426413E-7i 1.5836758340523903E-5-3.6674772201608206E-6i 3.1564919208774274E-5-8.373251229674972E-6i -1.013752722275799E...
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This document was uploaded on 01/24/2014.

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