H_75nm_L1_65um_D_4um

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Unformatted text preview: 80127213144E-6i 2.2379515748162707E-6-9.072467912015753E-7i 7.118767247562867E-5-1.566898660097178E-5i 8.386812429329419E-6 1.9885416861501234E-6 -4.558119568077892E-7 3.884318457001366E-6-1.3758688779217719E-6i 5.857037856949734E-7-3.356198248602672E-7i 6.92710398545417E-5-1.593499390002698E-5i 7.89008023265702E-6 2.295996371795919E-6 0 2.0378304866596383E-7-1.2439749227817024E-7i 5.205655894064201E-8-5.4209128162036047E-8i 7.100724317816946E-5-1.614820764771256E-5i 7.791969816527292E-6 2.6293763266002275E-6 -5.352524728920174E-7 4.416259383814155E-6-1.3726709645293724E-6i 7.414436113367762E-7-3.807521035447466E-7i 7.248715314432018E-5-1.676530543194343E-5i 7.725417595398214E-6 2.7209266762117323E-6 0 2.9682909365323793E-7-1.7785366113804497E-7i -5.912922277038583E-8-4.389354005571475E-8i 7.132986726652129E-5-1.6137056312552516E-5i 8.90305967239438E-6 9.797987438962258E-7 0 7.329334054002531E-6-2.626082696815038E-6i 1.4398199014218834E-6-5.119629507870788E-7i 6.822234161510217E-5-1.4898096477449565E-5i 8.791521830171575E-6 1.1766479074343252E-6 -2.9269814937535903E-7 3.598538691569682E-6-1.4614659873912827E-6i 4.931947267798681E-7-2.6726005473988874E-7i 6.70647452661919E-5-1.525931859225598E-5i 8.782766139842617E-6 1.4577887522471135E-6 0 7.4671902372945975E-6-2.6384072287371274E-6i 2.068307134194753E-6-7.645854234139776E-7i 6.957893443876148E-5-1.5181578195346367E-5i 8.196300869703162E-6 1.9738814992882256E-6 0 2.796437229864763E-7-1.8983888354858124E-7i 1.0364136705912892E-7-8.149223991709559E-8i 6.914596662479834E-5-1.5659022411667117E-5i 7.835184760072405E-6 1.9487763702487155E-6 -3.9233677089214345E-7 3.232841450792535E-6-9.88494889664734E-7i 3.5724054518491863E-7-1.8380370767897033E-7i 7.234625147830205E-5-1.6706220101420704E-5i 8.975704917716995E-6 4.923015330528335E-7 0 6.021510635029782E-6-2.3689177443759796E-6i 5.480166484695885E-7-2.2633201906996406E-7i 6.795828201935023E-5-1.4929375799890588E-5i 8.736586580291644E-6 6.960384329249068E-7 -3.4937232671614654E-7 3.334405172197344E-6-1.2475053340256564E-6i 2.1724365242114821E-7-1.1682002564023846E-7i 6.728982036065705E-5-1.538078840476789E-5i 8.974027177638896E-6 2.0558098199868703E-7 -2.8050159488348116E-7 3.6834495464289105E-6-1.548497674290832E-6i 8.721799089340186E-8-5.0968428290945316E-8i 6.681684213164176E-5-1.5192119455443734E-5i 8.999999999999999E-6 0 0 7.182749205014872E-6-2.6225119914370384E-6i 1.398003606676158E-7-2.7333975101160126E-8i 6.796551710800529E-5-1.4853339581878547E-5i 8.84233027306545E-6 -3.1913089717581545E-7 -3.92489421570358E-7 3.704716248019783E-6-1.3906302030318557E-6i -1.0946820619214215E-7+5.824385353076457E-8i 6.664582143843441E-5-1.5254230351262758E-5i 8.975712676401122E-6 -4.922228614052323E-7 0 6.498047866784762E-6-2.5017175652218906E-6i -7.436872961407575E-7+2.708839437523536E-7i 6.856620597374025E-5-1.5026956592459628E-5i 8.465985623769878E-6 6.2092761214674E-7 0 -2.2443156231827417E-7-1.8183802750890892E-8i -6.948071724650201E-8+6.614617317421412E-9i 6.83...
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This document was uploaded on 01/24/2014.

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