H_75nm_L1_65um_D_4um

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Unformatted text preview: 3691908769353E-8i 3.40370698323759E-7+1.296110743530652E-7i 1.622064329540929E-6-3.536576384028496E-7i 1.7780175451620632E-4 -1.2217388359886698E-5 0 5.642984876344142E-8+2.9343881271037963E-8i 3.876246863855454E-7+1.3959506816996477E-7i 1.4883324678379142E-6-3.834856920142792E-7i 1.726338599959167E-4 1.1323045249124773E-5 0 4.6955999115266206E-8+2.37138387041359E-8i -4.3357052928870117E-7-1.6381601622443728E-7i 1.605279012529218E-6-3.8804461700047597E-7i 1.7512893803947965E-4 1.1882987914009502E-5 0 5.258625728187536E-8+2.6851770923246292E-8i -4.0622562963798514E-7-1.4967650467878764E-7i 1.5403058067034875E-6-3.8812037838381043E-7i 1.754563207708617E-4 1.0034705415474825E-5 -1.914567228782444E-6 7.399010324281353E-8+1.5437143940068208E-8i -3.449477403856783E-7-1.3073561869619978E-7i 1.613672481090963E-6-3.5318077736020717E-7i 1.731223606115662E-4 1.1600318282559523E-5 -2.260721088799107E-6 8.855319312029366E-8+1.7739894241544082E-8i -3.464513180753778E-7-1.3035311290751394E-7i 1.5976209358628534E-6-3.8057727500987545E-7i 1.6005540113431222E-4 -1.3300206828623182E-5 0 5.231864464325201E-8+2.5677656730638288E-8i 4.857911653512927E-7+1.8798413420492536E-7i 1.7644339023968349E-6-4.65643410786317E-7i 1.6133652901254288E-4 -1.0392609519047125E-5 0 3.635885264836129E-8+1.77081853263349E-8i 5.140603005815563E-7+2.0602311357912432E-7i 1.858100876134151E-6-4.1505128974683077E-7i 1.628038082547982E-4 -1.3220975317933647E-5 0 5.369539596161005E-8+2.6470574364265423E-8i 4.7030897355634883E-7+1.8051356376586006E-7i 1.7142182387917519E-6-4.520268692412075E-7i 1.613094912778081E-4 -1.1570493905891208E-5 -1.2338864324521588E-6 6.761166410131653E-8+1.5807658874199843E-8i 4.4681985837297416E-7+1.7672377518765517E-7i 1.8175389230818029E-6-4.2742469701189683E-7i 1.638601453147409E-4 -1.0302771137744016E-5 0 3.680445278064717E-8+1.8054858225526317E-8i 4.983914476518732E-7+1.9830347695775302E-7i 1.8120667777436903E-6-4.032891347837965E-7i 2.1218738698351234E-4 -3.6240914818145314E-5 0 3.272141776548485E-7+1.866681406443921E-7i 3.427744456478703E-8+4.867452172808584E-9i 1.0506639431367902E-6-2.2412620170082785E-7i 2.11580957338187E-4 -3.232425331710533E-5 -2.6944452062267324E-6 2.795435491536339E-7+1.452037031579409E-7i 3.961950502139048E-8+5.7649648261714885E-9i 1.0575263284654192E-6-2.2675634624545822E-7i 2.117043276203202E-4 -5.8857335848255445E-5 -1.8684167586155994E-6 3.7144384088887627E-7+1.6955612362960743E-7i 1.0150305790944789E-8+1.604295657997917E-9i 1.0304383564290496E-6-2.1787461727380912E-7i 2.1228335425556053E-4 -5.9970651948576935E-5 0 4.068509969138532E-7+1.99001407495661E-7i 9.992621083066869E-9+3.02622977843944E-10i 1.0312692783851123E-6-2.145052909660071E-7i 2.1068194128651317E-4 -5.583394847858581E-5 0 3.8829261250121464E-7+1.9101029810965896E-7i 1.746767405593701E-8+1.8269051887189635E-9i 1.0114060927398075E-6-2.3858410082521185E-7i 2.1030009820116426E-4 -5.639878180236578E-5 -3.087966079611966E-6 3.522580143357914E-7+1.5221417026977636E-7i 1.351029632694274E-8+2.9975038...
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This document was uploaded on 01/24/2014.

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