H_75nm_L1_65um_D_4um

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Unformatted text preview: 72062E-8i 1.77733833135624E-6-4.720307849518341E-7i 8.29638950345809E-5 -1.50127010105083E-4 -7.996896495601283E-6 1.1265485537894123E-7-8.435688359897508E-8i -2.881515375903011E-7-3.846517049315904E-8i 2.3981604753873656E-6-5.92181234087571E-7i 9.008859850315544E-5 -1.4564471506181646E-4 -9.020645603715765E-6 1.1815826026934297E-7-9.131659604342251E-8i -3.417522574483205E-7-5.916625776844674E-8i 2.243064988457404E-6-5.964064948871814E-7i 8.382608238628002E-5 -1.4665527051722807E-4 -7.01962849251149E-6 6.717439173812535E-8-9.12425187506145E-8i -2.993873367029426E-7-5.526902154219606E-8i 2.4004017484971917E-6-6.231100202840504E-7i 8.741042569324964E-5 -1.4394048831578896E-4 -7.701521556587247E-6 7.459358220865991E-8-9.634367464040887E-8i -3.263613890213629E-7-6.231795402008423E-8i 2.3193305174992747E-6-6.297641444823791E-7i 8.678590645654587E-5 -1.5017042075602066E-4 -9.925323818843783E-6 1.5592425479906027E-7-8.860321272581592E-8i -3.172357995248743E-7-3.4898069576181296E-8i 2.294653309298246E-6-5.7129054661051E-7i 8.79600293880725E-5 -1.5394976993860198E-4 -1.2176363866516238E-5 2.1016380605774765E-7-8.92670886899153E-8i -3.107190239160724E-7-1.0649108188987661E-8i 2.2184178366907076E-6-5.390353782769303E-7i 9.740141742242776E-5 -1.5144865758431067E-4 -1.554818451680595E-5 2.5862411450204364E-7-9.764320592999375E-8i -3.55561097110051E-7-1.620163876529513E-8i 2.0202746980521652E-6-5.093492892339257E-7i 9.738595430627313E-5 -1.4539582573703386E-4 -1.5907518171389347E-5 2.675096913071282E-7-1.117851071033462E-7i -3.8500207107840355E-7-2.2140767913842652E-8i 2.0538825282619022E-6-5.505084902651016E-7i 7.898316654690504E-5 -1.5329154658758753E-4 -8.684672982004647E-6 1.4918176214597163E-7-8.191267109349711E-8i -2.5688360194315186E-7-9.050786340884635E-9i 2.457900073205245E-6-5.893903119854677E-7i 7.426349864813106E-5 -1.5064188116251657E-4 -9.98105274741548E-6 1.879078402746738E-7-1.0251064474990924E-7i -2.730777540307616E-7+1.3258717367262169E-8i 2.607766962009245E-6-6.363359508754913E-7i 6.915580245927423E-5 -1.50337438175919E-4 -9.163960863993086E-6 1.9366041205354036E-7-9.734732721377819E-8i -2.4661680730985194E-7+2.75811283284518E-8i 2.764515566535441E-6-6.676156590818798E-7i 7.489114781464134E-5 -1.5505125988806516E-4 -9.727700340100191E-6 1.904765110939937E-7-8.573625534925942E-8i -2.503750284855854E-7+1.6042480674684338E-8i 2.51887848627078E-6-6.05751068387662E-7i 7.401209951649035E-5 -1.6006432323295108E-4 -1.0057244814907206E-5 2.0541937684748755E-7-7.551483404430806E-8i -2.2910205066867034E-7+2.940068896613345E-8i 2.443574613363974E-6-5.87873482049792E-7i 8.303776305480452E-5 -1.5259203433632743E-4 -1.1483985443247413E-5 2.0346846017277305E-7-9.559255411153059E-8i -3.0626148255564845E-7-5.145511328493396E-9i 2.3462316981613688E-6-5.747544811155446E-7i 9.144599283561535E-5 -1.4901538141827607E-4 -1.4058091041086846E-5 2.3955112403648547E-7-1.0573411826395409E-7i -3.5972514830257826E-7-1.748904129916589E-8i 2.169726530712703E-6-5.561054441576738E-7i 8.547462...
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This document was uploaded on 01/24/2014.

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