H_75nm_L1_65um_D_4um

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Unformatted text preview: 1.9641736800072278E-4 -1.8639106959791933E-4 0 1.2292990296605868E-9-1.6149433025351206E-9i -1.347481528864854E-9+2.3374642400192627E-9i 7.849162441496629E-7-1.7977570886054594E-7i 2.0099390799891307E-4 -1.7965575376731538E-4 7.482163668424857E-6 -4.313441071169676E-8+6.615028606071354E-9i 2.99237111027214E-8+1.4898416810981351E-9i 7.827508447268669E-7-1.7671610336184131E-7i 2.0136363147651187E-4 -1.9126489514772086E-4 1.3147090882716278E-5 -6.717816701681165E-8+1.3351991152040996E-8i 4.4645138892431026E-8-3.235829217719055E-9i 7.321844837794861E-7-1.7271165211918092E-7i 2.0305318724647592E-4 -1.9999999999999993E-4 0 1.1192764511869215E-9-1.2213565624765192E-9i -8.991677926073355E-10+1.7105229446078395E-9i 7.004816030608229E-7-1.6661273480180258E-7i 2.181784330032501E-4 -1.9999999999999998E-4 -3.471962386772399E-5 1.4590250802958903E-7-3.4383274719749835E-8i -8.983961408583165E-8+1.691013158687776E-8i 6.02849355123453E-7-1.4782000252557403E-7i 2.2605162179362902E-4 -2.1625736078434343E-4 -1.9977196856482526E-5 7.207113387231862E-8-1.7709556056406215E-8i -4.593616063441294E-8+9.85256420130518E-9i 5.529059595492392E-7-1.35714430501176E-7i 2.0953717900745248E-4 -1.9999999999999998E-4 -1.8360717357818594E-5 8.444667415578996E-8-2.004392152025157E-8i -5.499119403059395E-8+9.927127063419402E-9i 6.602454309765029E-7-1.587665446958818E-7i 2.2317426347897895E-4 -1.9999999999999998E-4 0 1.7220968660529836E-9-1.334766717559927E-9i -1.1051980097734118E-9+1.45081314013243E-9i 6.097723355917746E-7-1.464476550848581E-7i 2.452522306700729E-4 -1.9999999999999996E-4 0 2.074838439763485E-9-1.3547202952741012E-9i -1.0102455255805688E-9+1.0620636375994195E-9i 5.268502571955739E-7-1.279040587413203E-7i 2.2584748067029902E-4 -1.8804791580984956E-4 9.617518597608485E-6 -4.1123487589311146E-8+7.247137836902276E-9i 2.4097474583395385E-8-1.7976225347661267E-9i 6.265728195392247E-7-1.485628776092843E-7i 2.447182927519672E-4 -1.8700892909065503E-4 1.0348632167873458E-5 -3.764654247239189E-8+6.882287530612747E-9i 1.9717614053131943E-8-2.201552344059049E-9i 5.520567137818792E-7-1.3266130083809143E-7i 2.4252915558347775E-4 -1.2039490917213118E-4 0 2.1545557027266527E-9-2.708034145369612E-9i -8.934226918797276E-10+3.581814344565961E-10i 7.12752851402536E-7-1.47682408080124E-7i 2.3866068587687268E-4 -1.18715063106092E-4 1.2187186719792174E-5 -8.926340984515391E-8+3.835420211327603E-10i 2.785983218937774E-8-9.546936560986557E-10i 7.320063770062164E-7-1.5385751736766214E-7i 2.4737084281651207E-4 -1.1350980170263692E-4 0 1.9751984844177564E-9-2.4484022972082607E-9i -8.795550174743909E-10+3.6020471091926546E-10i 6.950486774050401E-7-1.4638495562944145E-7i 2.456530972811314E-4 -1.2632673589109476E-4 7.629162773725499E-6 -4.4666058870167485E-8+1.6514132732515844E-9i 1.5383693412987208E-8-6.481142750454518E-10i 6.763597002373111E-7-1.4656978253559616E-7i 2.469375831728554E-4 -8.32697900427884E-5 0 2.623924676506598E-9-2.0377162862665295E-9i -2.2484361716941092E-10+2.0667087546586628E-10i 7.4748866190034...
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This document was uploaded on 01/24/2014.

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