H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 6E-6-1.3224469013565592E-6i -1.4097977999179742E-4+4.248435035429654E-5i -3.557013183452256E-5 -9.092346231578217E-5 0 4.4258432076906565E-8-2.4648155583555507E-8i 1.056498169668195E-8-1.2282942032762968E-8i -1.0244192496025298E-5+2.174612237818314E-6i -3.4056047799080876E-5 -9.16719880061269E-5 -2.2821412971395346E-6 9.91677101123809E-8-2.631596142535844E-7i 2.52204351120804E-7-7.24289889720583E-8i -9.897475864997059E-6+2.493073503027405E-6i -3.512279259409738E-5 -8.98009004010706E-5 -2.415968292715976E-6 -2.0184029732182464E-9-3.331552401156148E-7i 2.6668517326876056E-7-7.240189089638663E-8i -9.994077256969293E-6+2.4634139971075345E-6i -3.3192851081139256E-5 -9.074293643692149E-5 0 1.9623682402872053E-8-2.0760453542699132E-8i 1.3976914799952615E-8-1.4803460172429206E-8i -1.0149063221828404E-5+2.5541629612412695E-6i -3.5012054478892015E-5 -8.919734612128222E-5 0 4.487307467370456E-8-2.323131706350694E-9i 1.4549046104777347E-8-1.2472838646835984E-8i -1.0280427353135088E-5+2.3815399795165167E-6i -3.2500071736221154E-5 -8.940189967963954E-5 -1.8342191771382804E-6 1.7846146533887058E-7-1.8741672227172435E-7i 2.1610508378499342E-7-6.658127269583859E-8i -1.030101835401987E-5+2.6782208298632474E-6i -3.452570111108423E-5 -8.67070514901329E-5 -1.5601432181061529E-6 3.4051423678423585E-8-2.2794062694749448E-7i 1.8188142193991536E-7-5.504402564131261E-8i -1.0462578228050365E-5+2.555095765978847E-6i -3.495229552179574E-5 -9.258609691176442E-5 0 3.37811154743628E-8-1.9647109038884683E-9i 1.279002292865166E-8-1.4190365497736477E-8i -9.92745852934117E-6+2.3021102316456084E-6i -3.5725164154824846E-5 -9.266835428483744E-5 -2.034538193224323E-6 -1.342159520602987E-7-3.3940792339218205E-7i 2.2188374834905544E-7-5.837480499884529E-8i -9.715668491678577E-6+2.321318154769117E-6i -3.3110057950336356E-5 -1.0884883759334512E-4 0 1.5430675413645456E-8-1.1940440915528261E-8i 1.2872647439307605E-8-1.4432940650781212E-8i -8.338499038981478E-6+2.1002842334549498E-6i -3.3181387496174436E-5 -1.0620409424316084E-4 0 1.4861865344444941E-8-1.3503565417365011E-8i 1.1957608505005794E-8-1.5097338726399734E-8i -8.56864484741646E-6+2.1633670234477203E-6i -3.217672312275701E-5 -1.0689382768659859E-4 -2.294297101193172E-6 1.5980988946251945E-7-1.7136603897079736E-7i 2.3200208029737113E-7-6.835237501884811E-8i -8.511858467534305E-6+2.237601112642878E-6i -3.3739470808753024E-5 -1.0511306602559472E-4 -1.5728954311349136E-6 5.060182762944843E-8-1.5377736249932995E-7i 1.6170953010194444E-7-4.862849445341766E-8i -8.613288224622665E-6+2.1621650228034054E-6i -3.32345564398024E-5 -9.602113060606631E-5 0 1.2363110059310235E-8-2.0567417230906345E-8i 1.3811587327184719E-8-1.4802614154337441E-8i -9.587549494984267E-6+2.4070372389779412E-6i -3.310466843257894E-5 -9.609620700697029E-5 -2.8941471867398712E-6 2.1459839553293063E-7-2.606153667425983E-7i 3.111383612961072E-7-8.815747694055304E-8i -9.468610225998311E-6+2.4646276780173997E-6i -3.2064643093974364E-5 -9.319538053033788E-5 -2.1969217774529985E-6 2.1047693783546...
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This document was uploaded on 01/24/2014.

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