H_75nm_L1_65um_D_2um_new

047235019957014e 6 14712449841723891e 5

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Unformatted text preview: 7 1.290323132606483E-7 0 3.001824315289138E-6-8.966464404767751E-7i -5.579300832447842E-8+1.9211060107794864E-8i -3.5944281260277426E-4+9.960451866928923E-5i 3.609516351762268E-7 -1.4442009342309654E-7 0 2.873633226471717E-6-8.620268048299684E-7i -2.0417698714039756E-8+9.34077794279009E-9i -3.4714821346704117E-4+9.621897848660632E-5i 7.346179096266899E-7 -5.807351451498085E-7 0 3.2431058172053027E-6-9.640735615749445E-7i 1.2854474916600289E-8+1.4199681924114631E-9i -3.7934498724014623E-4+1.0508423851700983E-4i 8.888410474267991E-7 -4.631007823653534E-7 0 3.5274217600621426E-6-1.0415483219351607E-6i 3.224827564090531E-8-3.607076365991841E-9i -3.941364530923353E-4+1.0915653484652748E-4i 9.631532498757966E-7 -7.267276467646921E-7 0 3.504014584851137E-6-1.035823633310784E-6i 7.107454515335605E-8-1.3531075754807437E-8i -4.011901309077144E-4+1.1109825452071332E-4i 8.755693018786296E-7 -6.190523194990054E-7 -1.9018847168806868E-7 2.2042723732319696E-5-6.13914800859372E-6i 1.9938797076009156E-7-4.949394810660479E-8i -3.917573805915231E-4+1.0850197973617484E-4i 1.1097299864601082E-6 -4.6710312273093887E-7 0 3.7258994326772044E-6-1.0955875449358832E-6i 3.6730800623274718E-9+4.907366746761029E-9i -4.166665432877685E-4+1.153587144893661E-4i 1.2486727298344268E-6 -6.023233357113072E-7 -1.75777816252154E-7 2.3625109830880157E-5-6.572663282139584E-6i 1.3542720525813481E-7-3.0676283119762164E-8i -4.308462797738025E-4+1.1926207294821694E-4i 1.6808742754948123E-6 -4.774201538645857E-7 0 4.876643629118475E-6-1.4101927458728032E-6i -2.192672408455702E-8+1.3660176545471359E-8i -4.850471934043214E-4+1.3417924818710236E-4i 1.6052304452458436E-6 -6.664327729842833E-7 -1.7642307896030278E-7 2.7618528547854134E-5-7.669692954938548E-6i 6.533019926622887E-9+6.2081469726875986E-9i -4.7375014393360234E-4+1.3107036960133316E-4i 1.4006759266819252E-6 -5.069667036519286E-7 0 4.216284709257501E-6-1.2296811308987187E-6i -4.458136700913329E-8+1.915307492605933E-8i -4.4950533035091004E-4+1.2439756664386746E-4i 1.2659407672143652E-6 -7.743653759628027E-7 0 3.952239797754593E-6-1.1584295015534818E-6i 2.2606173710748578E-8+1.0869152007002875E-9i -4.336579623740096E-4+1.2003550891998073E-4i 1.0706277330936627E-6 -8.054998547200268E-7 -2.56617568573242E-7 3.073724896171526E-5-8.532039668209443E-6i 3.061710634298896E-7-7.789005277419649E-8i -4.107522312061142E-4+1.1373102224226939E-4i 2.0669930460924344E-6 -7.522696167500257E-7 0 5.510869014024439E-6-1.5839407165340302E-6i -2.7800101665143018E-8+1.792499353221626E-8i -5.415892234804701E-4+1.497382201309854E-4i 1.8743661554712715E-6 -6.338471974119102E-7 -2.142044925974585E-7 3.631708882375065E-5-1.0061426383059513E-5i -9.878518755085386E-8+3.593616516707322E-8i -5.102915221128212E-4+1.4112642055232513E-4i 2.1032310805978584E-6 -9.62566704028469E-7 0 5.758710919456789E-6-1.6527901916580328E-6i -5.7683555689600687E-8+2.7528844093183125E-8i -5.475467121039662E-4+1.5137719860755814E-4i 2.0756588169377883E-6 -8.20782571583286E-7 -2.70988594402227...
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This document was uploaded on 01/24/2014.

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