H_75nm_L1_65um_D_2um_new

057497292693269e 5 4683481604039319e 5

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Unformatted text preview: 95E-4 1.3636665472036355E-4 0 -4.659218201666668E-8+2.164786843831098E-9i -1.4583065475431184E-8-1.479697725756798E-8i -1.581840902783817E-5+4.866977362322222E-6i 1.962499992062446E-4 1.3468314624162284E-4 3.87326315723708E-6 2.2064498811137766E-6-6.62143309275269E-7i 1.457707777414139E-6-4.7341622277134E-7i -1.661539775950829E-5+5.11508724721352E-6i 2.0019765390361644E-4 1.34507991113852E-4 0 9.915745595643978E-9-1.2524350867911974E-8i 1.869506815327382E-8-2.4076091023617074E-8i -1.5101860016966125E-5+4.659434337134535E-6i 2.0124459855008428E-4 1.3946255381813594E-4 0 -1.0932956504887981E-8-4.069815412339565E-9i -2.7279584042360036E-9-1.7262647250317526E-8i -1.32757029973021E-5+4.096638743560079E-6i 2.054468385224916E-4 1.5876058458059444E-4 0 -1.4536991310610497E-9-8.51371598840118E-10i 1.2231072034773432E-8-1.9876897674548803E-8i -8.365405005393708E-6+2.588321357035521E-6i 2.0233985955657734E-4 1.5207019840924826E-4 5.908825558629353E-6 1.0934022290129716E-6-3.372367152527281E-7i 1.1787591704431727E-6-3.804659347536652E-7i -9.765142146745145E-6+3.0199343329425682E-6i 2.0056114530983896E-4 1.4588473316856643E-4 0 4.624408945736912E-9-8.551962278487273E-9i 3.545207836892898E-9-1.9940271972433067E-8i -1.1795293804612634E-5+3.638760449196605E-6i 2.0640282241236727E-4 1.5022288241903605E-4 0 -1.0962176858267392E-8-3.1476763209803416E-10i 1.9607015406576668E-8-2.285623975362139E-8i -9.613655997125869E-6+2.9725552133371998E-6i 2.1231354326722252E-4 1.554631625934075E-4 0 -8.14806567435838E-9+7.002166645505816E-10i -2.7560221967729465E-8-6.318143278718892E-9i -7.928239263443916E-6+2.451988633968471E-6i 2.0365675091836365E-4 1.1365627220271996E-4 0 -7.341567408983198E-8+8.880256154118055E-9i -1.1035318385000173E-8-1.5667950042843465E-8i -2.024134883579179E-5+6.275061927984761E-6i 2.0451601171913957E-4 1.0362406332426522E-4 0 -6.305725558657278E-8+3.898032733040101E-9i 2.476353668304232E-8-2.6673341731522915E-8i -2.355264603817034E-5+7.3034481941169485E-6i 2.0244340984987874E-4 9.626254139809098E-5 0 -1.4632182953009756E-7+2.7811554654741388E-8i 4.776897818742267E-8-3.435352689684154E-8i -2.892780057946881E-5+8.972867944768433E-6i 1.9792432293300102E-4 1.0316660597177126E-4 4.332960827515144E-6 5.255876799485397E-6-1.656103791268702E-6i 2.4345980759141237E-6-7.817056965910861E-7i -2.9000460782166343E-5+9.011137091274372E-6i 1.992142184219656E-4 1.1093141615291169E-4 3.8965285264318905E-6 3.4593839372804E-6-1.0888289351876357E-6i 1.8015686642361023E-6-5.849653091492089E-7i -2.4041926271495556E-5+7.461411393199027E-6i 2.1170915607078659E-4 1.0708318887532923E-4 0 -2.2173008935613944E-7+5.730185859836867E-8i -1.5013663397344593E-7+3.035874914688552E-8i -1.8067213723090188E-5+5.58793211182298E-6i 1.9442052545156515E-4 8.44140948156733E-5 0 2.8217750156612044E-7-1.1571667130261991E-7i -1.2535075862626227E-7+1.5189604803123036E-8i -5.1547207931031286E-5+1.60029096681297E-5i 1.938046677276896E-4 8.394049799255347E-5 4.260203385996163E-6 1.2928963667768644E-5-4.061416319317962E...
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This document was uploaded on 01/24/2014.

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