H_75nm_L1_65um_D_2um_new

099106053024073e 7 3032050797497927e 6

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Unformatted text preview: 4076683E-5+3.9785275675106235E-6i -3.2866333746794836E-5 4.916884309112266E-5 0 3.5970550545849234E-8-2.9043386575186965E-8i -1.3064537892487627E-8+1.131943649824401E-8i -1.5666014407147447E-5+4.0981580770823564E-6i -3.310848708503523E-5 4.6601236033120915E-5 0 2.3506591909714582E-8-3.349642595145999E-8i -8.17275247209673E-9+1.1277128590480629E-8i -1.600162107592809E-5+4.185500116149247E-6i -3.2106858069765355E-5 4.774972554901938E-5 -1.4405537331689926E-6 4.2502249978900244E-7-2.529405661254834E-7i -2.481900707094987E-7+7.93794243361852E-8i -1.606105120132719E-5+4.297360690296102E-6i -3.3400175883263E-5 5.697599663952425E-5 0 2.9156998494014232E-8-2.9580138923760522E-8i -6.77363547783967E-9+1.3818555127088372E-8i -1.4361159836260266E-5+3.6812296072975266E-6i -1.5541667405010283E-4 1.441902042450692E-6 0 2.8774594761119602E-9-7.997719222678339E-10i -2.595354805508759E-10-1.0082721195648372E-9i -2.6167971709514685E-6+5.129048149380401E-7i -1.5391592833120948E-4 9.008682310733308E-7 -2.2729249138929382E-6 9.024564134435176E-8-3.300254882586663E-9i 2.625360143711192E-8+8.805977271716232E-9i -2.6279302231784685E-6+5.290579534457915E-7i -1.5409484472208505E-4 -5.577316064874025E-7 0 3.202173711440307E-9-9.451937435952529E-10i 2.230914596925286E-9+7.055604658939296E-10i -2.660818842067698E-6+5.163338569729111E-7i -1.5562392727668827E-4 -1.1304149144082812E-6 -2.9800848603331992E-6 1.1535382074711187E-7-3.0091502767219847E-9i -3.6399974828791405E-8-1.2458280183580268E-8i -2.542518777863737E-6+5.335163762446452E-7i -1.5198406350291644E-4 -1.283527880374159E-6 0 3.4440986484590648E-9-7.744417740749394E-10i -1.2346638375889072E-9-2.4844451298039007E-10i -2.7456732568068215E-6+5.177494483328844E-7i -1.4941200355277415E-4 -1.162738177715541E-6 0 3.6374469385248736E-9-5.909468659434056E-10i -1.2634469330511783E-9-4.1150848791771803E-10i -2.8469966993714515E-6+5.225188291703262E-7i -1.4363823394753037E-4 3.0357543175942546E-6 0 4.2131310915454E-9-5.677081425816644E-10i -9.821933926823881E-9-7.345827124416954E-9i -3.1657799243759647E-6+5.085125369204003E-7i -1.436368297098324E-4 2.6207397651537897E-6 -1.8044818502011179E-6 8.130526950285217E-8-6.684401351121639E-9i 9.696641993834108E-8+3.7759876154411667E-8i -3.0912914844882158E-6+5.363243749748287E-7i -1.454119743821557E-4 1.4695702438016778E-6 0 2.464288775973914E-9-1.2472003472751801E-9i 1.5811092136282569E-9-1.299703334458344E-10i -3.0193538980280555E-6+5.296011807934801E-7i -1.4803010122067616E-4 1.186286131685645E-6 0 4.420581430928637E-9-4.4889527871624013E-10i -2.3049145755355224E-10-7.471225078129381E-10i -2.905984801306091E-6+5.244787064699372E-7i -1.4926765613436764E-4 2.5673002947917156E-7 -2.2524014843731126E-6 9.368982322489623E-8-5.888749520213725E-9i 1.0753532059239328E-8+3.675839868835348E-9i -2.8051650095765366E-6+5.392596655765565E-7i -1.5054469999640848E-4 1.4640055094637195E-6 0 2.5969179342679127E-9-9.861632979119249E-10i -4.536546020494451E-10-1.1127736746140466E-9i -2.8083624081452315E-6+...
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This document was uploaded on 01/24/2014.

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