H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 66721073177E-9i -5.782181347851849E-8+3.688636240157736E-8i -1.7881626591908534E-5+5.370562895998145E-6i 3.2868731048067254E-5 1.415219958266128E-4 0 1.5821040806805543E-7-4.0748369325597067E-8i -4.618523100471553E-8+3.59092093441379E-8i -1.8283038451265027E-5+5.519840840963095E-6i 3.452978448180577E-5 1.432781362497986E-4 2.6536921938481947E-6 -2.993343428435057E-6+7.706715199510726E-7i 1.5535428996847432E-6-4.3749312270640656E-7i -1.7789765974860937E-5+5.399557430002406E-6i 3.6694945743601445E-5 1.323785898582561E-4 1.1032750373486162E-6 -8.143351083907587E-6+2.028520854971405E-6i 1.1458279404098308E-6-3.2562683520513205E-7i -3.223546706805405E-5+9.501768648443806E-6i 3.4377536160133014E-5 1.3117635798689102E-4 1.840956911975697E-6 -3.990131126354623E-6+1.0808463664293897E-6i 1.265232335094833E-6-3.69587360083711E-7i -2.553965799074593E-5+7.744233804968674E-6i 3.3344585685353946E-5 1.3027302757203786E-4 0 1.4602121165659499E-7-4.495737964733076E-8i -2.915684995020101E-8+3.34042855980321E-8i -2.5387823564479664E-5+7.69571868475666E-6i 3.315494885083563E-5 1.328813721903967E-4 0 1.6426132165570095E-7-4.7361014968161366E-8i -6.862567957233167E-8+4.226614530866701E-8i -2.3596497668723515E-5+7.138345422792017E-6i 3.0875731928403795E-5 1.3141736922825837E-4 0 6.701268223347725E-8-2.3051368270230874E-8i -6.191415636507762E-8+4.220181673024613E-8i -2.1454614851161706E-5+6.560887063894952E-6i 3.656100300527139E-5 1.298248098705902E-4 1.245808203630459E-6 -8.561584423583414E-6+2.2018692260496416E-6i 1.3640418564735194E-6-3.923530045160546E-7i -3.3197249121689566E-5+9.89077144063442E-6i 4.024996665790276E-5 1.3081799935363392E-4 7.500000000000002E-8 -2.2130250557951103E-5+5.792895120555926E-6i 3.017126976904809E-6-8.627707778659233E-7i -2.487644363156674E-5+8.27833188016448E-6i 3.8839778774400055E-5 1.2892996801890653E-4 7.5E-8 -2.3730144212058546E-5+6.0810879274573555E-6i 1.6538154291451113E-6-4.6698253356828684E-7i -2.990076898178603E-5+9.568348063822558E-6i 3.4306334942214704E-5 1.2860376056522246E-4 2.2143382106281508E-6 -4.8728146268803345E-6+1.3462711208185214E-6i 1.5359057209456458E-6-4.5600150320539067E-7i -2.6877659023081244E-5+8.17937189671712E-6i 3.3268729196970513E-5 1.277633653798742E-4 0 7.158039768572931E-8-2.5084686405092357E-8i -1.564301717153771E-8+2.875938702809333E-8i -2.6871284313705965E-5+8.16547999660116E-6i 3.327049471117319E-5 1.2516071836599565E-4 0 1.8630997294716927E-7-5.69349619218775E-8i -2.2131679961532515E-8+3.2363916371342345E-8i -2.8692976319880406E-5+8.736717612651762E-6i 3.0302347825777484E-5 1.287547463791823E-4 0 1.6593647443434445E-7-4.978070278910396E-8i -7.763243498916383E-8+4.8123853596537813E-8i -2.2056082751314292E-5+6.769271265071603E-6i 3.1105657850022545E-5 1.2636049577205183E-4 0 2.7294118112875446E-7-7.996327025528375E-8i -7.966960960834299E-8+4.907055463102247E-8i -2.4548120670442632E-5+7.518467408635789E-6i 3.63138096844198E-5 1.2488630498798327E-4 1.937827246281844E-6 -1.0254317867375396E-5+2.7849630726817636E-...
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This document was uploaded on 01/24/2014.

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