H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 217621E-5+7.697760383619589E-6i 1.5266939616508335E-4 -1.4939573467567362E-4 7.500000000000001E-8 3.25562735781167E-6-1.054928574099311E-6i -2.59326737932366E-5+7.562616211892008E-6i -1.9580312799393872E-5+6.892045808075781E-6i 1.4790697480387586E-4 -1.4575288787709397E-4 7.500000000000001E-8 4.729066890470518E-6-1.603483712298442E-6i -2.8350635883401125E-5+8.798817348120842E-6i -1.5926115941957007E-5+5.905068068343466E-6i 1.4561097216523507E-4 -1.4847291097043336E-4 7.500000000000002E-8 3.191230018462221E-6-1.0699104364408907E-6i -2.9459822171083727E-5+8.916392302174558E-6i -1.936310048878814E-5+6.923700428391126E-6i 1.461965051017534E-4 -1.5030777357533784E-4 2.830581286345228E-6 2.8903563752205684E-6-9.604840945369974E-7i -2.4299182436181815E-5+7.286796355587604E-6i -2.1645455409506486E-5+7.255761396268307E-6i 1.3988747986363177E-4 -1.0805067524887362E-4 1.2099467503261654E-5 1.7889553788312365E-5-6.421814317843792E-6i -4.0530779835516224E-5+1.388214319157074E-5i 2.675480584816162E-6-1.6652919557241868E-6i 1.4398285736650604E-4 -1.1275808426334974E-4 7.5E-8 2.1288054524437462E-5-7.88800409440873E-6i -3.9921781520029836E-5+1.4172555785856093E-5i -8.330485717735557E-7-1.5041398216099137E-7i 1.437791712215494E-4 -1.4608667011176057E-4 7.5E-8 4.1243415450734995E-6-1.408539095563525E-6i -3.022629705977618E-5+9.449645659962333E-6i -1.6475120903295622E-5+6.090533365149922E-6i 1.4312772814298338E-4 -1.4668854565702343E-4 4.299483368062601E-6 4.17704482466709E-6-1.425158298952534E-6i -2.5773563208343842E-5+8.10863086599687E-6i -1.6686414086377183E-5+5.7984636235587295E-6i 1.445347435333611E-4 -1.4105970758319746E-4 7.500000000000001E-8 6.570721964827211E-6-2.2969329228500054E-6i -3.014826801523448E-5+9.838458527536713E-6i -1.230084141696313E-5+4.739647391693241E-6i 1.3082053504385132E-4 -1.435903973133581E-4 5.283778145075624E-6 3.4041899391704548E-6-1.184364876865413E-6i -2.99779217378896E-5+9.814411392495102E-6i -1.4180571179227998E-5+4.979254732850504E-6i 1.3885546942240688E-4 -1.396095090925193E-4 7.500000000000002E-8 6.088249525210837E-6-2.16110633591976E-6i -3.2669630014175305E-5+1.0879798309494995E-5i -1.1204500202844161E-5+4.331720755162429E-6i 1.3812463326738335E-4 -1.4051229119377154E-4 4.6387220891152195E-6 5.636387926896214E-6-1.9758859967520175E-6i -2.9613139958698395E-5+9.787364575558195E-6i -1.1722825220367667E-5+4.239914525591729E-6i 1.423757487541042E-4 -1.3387419798323438E-4 7.500000000000001E-8 9.454764502993783E-6-3.394003287834468E-6i -3.22216265929055E-5+1.1004339101830691E-5i -8.188620788409093E-6+3.2092683300979806E-6i 1.48122343793411E-4 -1.5538968887213078E-4 2.732072420854764E-6 1.3090944951310232E-6-4.15095726041147E-7i -1.2264791240995544E-5+3.572879053228476E-6i -2.8016913181276206E-5+8.7038331178775E-6i 1.3941580681884743E-4 -1.2730466497834806E-4 7.500000000000001E-8 1.1454461031271034E-5-4.191805633940942E-6i -3.534682042568352E-5+1.2400502878408623E-5i -5.0765703624844635E-6+1.8684083370762785E-6i 1.3955820292957703E-4 -1.3011243705817407E-4 7.43291283653...
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This document was uploaded on 01/24/2014.

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