H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 69894353413349E-8i 2.01589123803531E-5 2.675712000467362E-4 -2.6120134288401905E-4 2.929081288819147E-7-9.251754176143619E-8i -8.484947016760515E-7+2.575553452210671E-7i 2.8167841947993787E-7-8.614096548846261E-8i 6.316757722751596E-5 2.4453386386166033E-4 -1.9756246850449066E-4 3.1048347618723877E-7-9.983779267576079E-8i -1.5795103502969729E-6+4.828118071207146E-7i 3.154749472742782E-7-9.965170414104363E-8i -3.9176826867603863E-4 1.743827516006466E-4 -1.782851341518587E-4 1.7626866812018814E-7-5.207522056710548E-8i -6.136805433330898E-8+1.771974080842672E-8i -1.392303154894594E-7+4.234778747947702E-8i -3.560437673051893E-4 2.0913226909457188E-5 -1.8207072624742342E-4 2.9683702025325924E-7-8.651851051314917E-8i -1.3102296087673539E-8+3.709513036509571E-9i -1.652320931910422E-7+5.1004683793933644E-8i -4.297326428096592E-4 1.35497625549311E-4 -2.2982846927047413E-4 1.6832825755516917E-7-4.99860329877947E-8i -4.2321871325976985E-8+1.2319933357751898E-8i -8.820999841772164E-8+2.7219659404889857E-8i -5.46533579905579E-4 1.8091812762084972E-4 -2.28411214435276E-4 8.388045548246886E-8-2.510399289782145E-8i -2.3526250328604902E-8+6.938045496706771E-9i -6.544005990921348E-8+2.0008910014585032E-8i -1.8632055113344302E-4 -1.4102056517732278E-4 3.2573519275368373E-6 -1.640550812018723E-7-6.51215671517963E-8i -5.123655956821678E-8-1.2428828960006732E-8i -1.2390240430771264E-6+2.5941719155830245E-7i -1.8528170967612256E-4 -1.4407313954393084E-4 2.6499055697541117E-6 -1.606528886493727E-7-6.661789438140694E-8i -5.6492748801978246E-8-1.670689601331893E-8i -1.2152955292180917E-6+2.716957489448678E-7i -1.8795506382014861E-4 -1.4756460258385902E-4 3.5232210824644773E-6 -8.616299922275321E-8-3.305335199908043E-8i -4.3659691880807604E-8-1.0663251298697688E-8i -1.1562447263353108E-6+2.588864867848692E-7i -1.8659962144598082E-4 -1.5043887749236742E-4 4.31824970799961E-6 -8.984112346748693E-8-2.6020002360144772E-8i -5.722437012094817E-8-1.6053416952947524E-8i -1.1365152558594606E-6+2.69969317657259E-7i -1.8660896842170426E-4 -1.3923999929066385E-4 6.532919798540717E-6 -1.829806090513416E-7-4.4759932551801714E-8i -7.579460665488249E-8-1.2853633443330944E-8i -1.19231043123076E-6+2.763806428821968E-7i -3.419346147020368E-4 1.1053611533508847E-4 -1.1447915369155124E-4 2.3145847957126522E-7-6.645927275588816E-8i -5.691445051398923E-8+1.5839876829930953E-8i -2.6850882741144604E-7+8.035681311314205E-8i -3.394590725768111E-4 4.720036561155996E-5 -1.1026152689078275E-4 2.575757242016007E-7-7.323851547686649E-8i -2.7377695401642646E-8+7.579340125948921E-9i -2.947824292321005E-7+8.799651681187744E-8i -3.8539713405782235E-4 2.2379751367525438E-4 -1.0778273796634739E-4 1.1372251714317771E-7-3.3590047091751274E-8i -5.108158700800903E-8+1.4759479386283331E-8i -1.8604197075372808E-7+5.576323968622427E-8i -4.436527858118784E-4 2.8759153192061505E-4 -1.0867548180750382E-4 6.400098344580045E-8-1.9167195828470546E-8i -3.285351345645604E-8+9.697760074409664E-9i -1.2703882890734367E-7+3.8286859955637...
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This document was uploaded on 01/24/2014.

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