H_75nm_L1_65um_D_2um_new

138494075878536e 432218115643878576e 5i

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Unformatted text preview: 4355315E-6-7.023603020295255E-7i 1.9317417506008058E-7-5.6363145544741595E-8i -2.9344875311070935E-4+8.142627744499687E-5i 1.8736068710283E-7 -2.432649659230386E-6 0 2.6888363651722536E-6-8.254175983521154E-7i 2.1935921103797476E-7-5.793072676108967E-8i -3.2736843239712275E-4+9.076939315790102E-5i 4.5590453922435023E-7 -2.4841078602083788E-6 0 3.0656157839358144E-6-9.292435596121152E-7i 2.1771535371133903E-7-5.4291482112469836E-8i -3.487179222469994E-4+9.664800197328738E-5i 3.152585129411594E-7 -2.560086874354676E-6 -2.5145883893272777E-7 2.290994529786828E-5-6.394456719138171E-6i 1.727438925521899E-6-4.723803936980607E-7i -3.355723283889428E-4+9.302903856682278E-5i -4.232741822665731E-8 -2.5241113946024134E-6 0 2.5191903602948663E-6-7.800755348804275E-7i 2.1882426889015724E-7-6.061034313948394E-8i -3.100227768594434E-4+8.599188284606917E-5i 3.4758666889230123E-7 -2.7003528021876903E-6 0 2.7344389437605754E-6-8.41126841376129E-7i 2.5538777309597194E-7-6.570753362046742E-8i -3.3847124555266356E-4+9.382581811409665E-5i 6.091888046891974E-7 -2.8087137893566104E-6 -2.7437176791246803E-7 2.7740534669149868E-5-7.725402153243669E-6i 2.1402103638721672E-6-5.824075751045821E-7i -3.5859150089899774E-4+9.936526494216946E-5i 2.9406325890374724E-7 -2.985553013070454E-6 0 2.877195831421653E-6-8.845126645978807E-7i 2.6149506827666257E-7-6.792213558259874E-8i -3.321944072743277E-4+9.209624848708354E-5i 4.4426293855337785E-7 -3.05782701018783E-6 -2.058792494939566E-7 2.02962134687526E-5-5.680569681129043E-6i 1.9274844484731823E-6-5.252655693108177E-7i -3.430923242081589E-4+9.509667450185537E-5i 2.3007680901296918E-7 -2.86628120309806E-6 -2.628692181457116E-7 2.3041736833865547E-5-6.435067789306077E-6i 2.076798373739439E-6-5.697385102991377E-7i -3.2689717071349156E-4+9.063922933371963E-5i 8.708792577678123E-7 -2.870813354413396E-6 0 3.675562072110198E-6-1.1013172960651265E-6i 2.9587690397736566E-7-6.89216835159101E-8i -3.8447407051679357E-4+1.0648858236603441E-4i 8.113545484574769E-7 -3.0589143251455065E-6 -2.986387929365176E-7 3.260454914400315E-5-9.06581234369717E-6i 2.6031521959031987E-6-7.068844499122373E-7i -3.7531690533475215E-4+1.0396662744595099E-4i 5.852893149423225E-7 -2.9423521906240354E-6 0 3.031640060746632E-6-9.259398648264749E-7i 3.2715516412595846E-7-8.151731527572536E-8i -3.569764852997985E-4+9.891921070737048E-5i -7.109405166821313E-7 -2.635017251782229E-6 0 1.9542829607255287E-6-6.262882856211682E-7i 2.1419575308989635E-7-6.836638862806055E-8i -2.676398964561328E-4+7.431375009727783E-5i -4.1631491099130455E-7 -2.7094684933311043E-6 0 2.2632248727239805E-6-7.122645092180349E-7i 2.0781117349056538E-7-6.303875265638898E-8i -2.8448809892697317E-4+7.895686070551784E-5i -5.852671894261961E-7 -2.9423565766678406E-6 0 2.1681790672523072E-6-6.896451884674804E-7i 2.1461221058616253E-7-6.876309472936271E-8i -2.7295949622062733E-4+7.577960465461665E-5i -5.099106053024073E-7 -3.032050797497927E-6 -1.9700978147543797E-7 1.3740330833536651E-5-3.879879116977456E-6i 1.58328051...
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