H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 4142E-4 -2.5042512682631494E-4 3.3885837706188837E-4 -1.0408193214703476E-8+3.160857563834319E-9i -3.800618677827661E-9+1.1323693861249294E-9i -4.159579715572263E-9+1.3569911144434334E-9i -6.684134946373829E-4 -2.638407586205819E-4 3.5701150440448955E-4 -2.4392804069661347E-11+8.048603359218003E-12i -9.296832538992467E-12+2.7914694267411555E-12i -6.7314784533172594E-12+3.3675999853696217E-12i -6.797425369193725E-4 -2.683126358853375E-4 3.630625468520233E-4 -9.913035690318819E-19+5.9391597269387305E-19i -3.1998665934559525E-19+9.991909645288887E-20i -2.0146919615047085E-18+1.146989445823692E-18i -6.552839288655582E-4 -1.8587044432702632E-4 3.0912643124810863E-4 -5.524693165098723E-8+1.646924437829438E-8i -1.3515250025388904E-8+3.9560105313689214E-9i -2.8456632127630024E-8+8.939378337462568E-9i -6.671981821176593E-4 -1.892499069511541E-4 3.147469118162561E-4 -1.003389395949002E-8+3.0408896072846336E-9i -2.6484389587064545E-9+7.878344585891196E-10i -4.8626602298414425E-9+1.57064871625769E-9i -6.823780471208459E-4 -1.2392232931485603E-4 2.801918219804438E-4 -5.0760940750586475E-8+1.5088868163467272E-8i -7.970227716951397E-9+2.3257025889759087E-9i -3.225722823459197E-8+1.0057458462799751E-8i -6.947849207048614E-4 -1.2617546257512614E-4 2.8528621874372457E-4 -9.344867530722088E-9+2.826593168854281E-9i -1.5853376805096545E-9+4.707633661392611E-10i -5.639731928927968E-9+1.805427781808061E-9i -7.031357774397731E-4 -6.126079244298363E-5 2.476917313787915E-4 -4.544860830556584E-8+1.3474465988303842E-8i -3.4412894671498348E-9+1.0012351002548062E-9i -3.617999389686781E-8+1.1209209884615991E-8i -7.159200643023144E-4 -6.237462503285605E-5 2.521952174038604E-4 -8.421020408475064E-9+2.542523488156852E-9i -6.854854343527063E-10+2.0314630963284603E-10i -6.387767640530718E-9+2.03050396527046E-9i -7.157912121794917E-4 0 2.1713346152179143E-4 -4.0349478938528E-8+1.193597991561023E-8i -6.116740216445244E-11+1.8814388304912042E-11i -3.9376241268672315E-8+1.21447809992442E-8i -7.288055978554826E-4 0 2.2108134264036915E-4 -7.433621417742612E-9+2.2409410113761635E-9i 3.5187464757501067E-12-9.66764741665675E-13i -7.022512783077724E-9+2.220647118850711E-9i -7.029409418739626E-4 -1.9938829482353732E-4 3.316083535206984E-4 -2.3892389526588613E-11+7.844438546835485E-12i -6.579415520298937E-12+1.9807570512415335E-12i -8.474949717102538E-12+3.960236421858914E-12i -7.148551951260637E-4 -2.027677574476651E-4 3.372288340888458E-4 -9.6702365679533E-19+5.694790270570523E-19i -2.1685899986624504E-19+6.531985661989012E-20i -2.072548042758058E-18+1.1870348693324123E-18i -7.418199835314732E-4 0 2.2502922375894759E-4 -1.4293088389497469E-9+4.3674300797334236E-10i 7.465695737437205E-13-2.086079575603466E-13i -1.2909309978686584E-9+4.222574476965536E-10i -7.287043511648558E-4 -6.348845762272847E-5 2.5669870342892934E-4 -1.6127564040206491E-9+4.935311523917602E-10i -1.3465514775478918E-10+4.0153912005584104E-11i -1.1639352206418978E-9+3.837453849011003E-10i -7.320055414569076E-4 -1.329348623559365E-4 3....
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This document was uploaded on 01/24/2014.

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