H_75nm_L1_65um_D_2um_new

177478917130383e 4 15526517355538415e 4

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Unformatted text preview: 40574203040196E-5i 3.598557980631554E-5 -1.0870678842335498E-4 -9.6463000493664E-7 1.026343524468032E-5-2.9422618184511695E-6i 1.306646154606443E-6-4.3879426908518706E-7i -5.479980114175021E-5+1.670218770013032E-5i 3.542151170424729E-5 -1.0833354402913845E-4 0 -9.855381216636836E-7+2.3924212947754734E-7i 1.4343716808304548E-7-6.904936420632293E-8i -5.270455659003692E-5+1.6091702129786057E-5i 3.607333060012941E-5 -1.0756750890737469E-4 -1.1369192610808545E-6 1.2858290961305826E-5-3.6871605812542154E-6i 1.5783232949345694E-6-5.223684589559611E-7i -5.606141518071725E-5+1.7117783096394387E-5i 3.5445397602928565E-5 -1.1144720475021695E-4 0 -1.6235695646258836E-6+4.0531050782705076E-7i 5.2854496999337515E-8-4.473239011545552E-8i -5.083672393985419E-5+1.5415882342078914E-5i 3.699999999999999E-5 -9.867698614015749E-5 0 2.78862993471119E-5-7.685259632967574E-6i -6.09176508040328E-7+1.4326591652221118E-7i -1.0174076065257501E-4+3.057024983312313E-5i 3.6411823009439266E-5 -9.787107599419924E-5 -1.0046618689253164E-6 1.8954630374021925E-5-5.506500920975099E-6i 1.9753884454382088E-6-6.405734285619414E-7i -7.369602537578012E-5+2.25932945634999E-5i 3.653668194804875E-5 -1.0001342435011044E-4 -1.7327873342980808E-6 2.278077761569051E-5-6.675658651087111E-6i 3.0046170076063193E-6-9.6307424364885E-7i -6.248142828036683E-5+1.932038512094334E-5i 3.74404140266224E-5 -1.0179592699913029E-4 -1.6324233002374293E-6 3.140719867288609E-5-9.099848416887848E-6i 3.3492158742374697E-6-1.0693469701323087E-6i -6.161599173012974E-5+1.91539668242389E-5i 3.7E-5 -1.0038797517810111E-4 0 3.0012609488833823E-5-8.240589047029096E-6i 2.9145923936269023E-7-1.2022887836415918E-7i -9.770104982232208E-5+2.9338361358277637E-5i 3.699999999999999E-5 -1.0209896421604475E-4 0 2.3794919304816285E-5-6.499192739796795E-6i 9.642582354807416E-8-6.05793346597494E-8i -9.645072324680943E-5+2.8799697294496374E-5i 3.591789404499116E-5 -1.0485741813948232E-4 0 2.3611194527317636E-7-9.578013375014886E-8i -8.027732033751474E-8-1.2681327500442386E-8i -6.46484023309427E-5+1.9613696179223824E-5i 3.525978560184008E-5 -1.0446870496795019E-4 -1.295009628915739E-6 9.983253634490784E-6-2.9395672032099684E-6i 1.8218010133349806E-6-5.921004445333543E-7i -5.392445625186205E-5+1.6577664798212493E-5i 3.53962979717899E-5 -9.464946058907023E-5 0 -2.224027827602004E-6+5.851801027856318E-7i -2.303287896687767E-7+3.614870855983554E-8i -7.160840306559079E-5+2.2018765030261808E-5i 3.5473408530491856E-5 -9.271913706861113E-5 0 -3.72950257067813E-6+1.0086955150589993E-6i -1.0291961806870494E-7-3.4547427511337028E-9i -7.8067628342145E-5+2.3934623432324138E-5i 3.539678083656557E-5 -1.0337451535046894E-4 0 6.362735472664749E-7-2.0253280838544718E-7i 1.783426261271065E-7-7.880792408931914E-8i -5.8824926740119084E-5+1.8022622788457755E-5i 3.514527499294543E-5 -1.0266204092484426E-4 -1.3240593848225738E-6 9.153244237761709E-6-2.7307786486632537E-6i 1.610401519958754E-6-5.377785039519094E-7i -5.467438888083361E-5+1.6855483114959618E-5i 3.54115595522460...
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This document was uploaded on 01/24/2014.

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