H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 270166452E-4 2.4230968219881304E-6 -1.0303447272478371E-7-5.046322131952026E-8i 3.8371165504787614E-8+1.0304488342049332E-8i -1.209043520156358E-6+2.520449790603714E-7i -1.886638394884212E-4 1.4402059304760185E-4 1.58754529087678E-6 -5.3931767907309113E-8-3.520356757361412E-8i 2.000048693681514E-8+5.301274780194927E-9i -1.2104003070623883E-6+2.3468326307126441E-7i -1.8126621941986506E-4 1.456949804268056E-4 7.5E-8 -1.7497837801861642E-7-7.941258848117829E-8i 1.0039617430148942E-7+4.286007171163305E-8i -1.1749752851401897E-6+3.1554233920949025E-7i -1.8356627347669582E-4 1.4473238616137868E-4 1.8151727860193477E-6 -1.82990223160575E-7-7.566333992061901E-8i 7.089724922477894E-8+2.5078709267430045E-8i -1.2015040957384022E-6+2.9027960440921826E-7i -1.8471146399091194E-4 1.3998181717016396E-4 1.8959463871139606E-6 -2.2760066469535484E-7-9.75899160899271E-8i 5.277543797068629E-8+1.646610160604627E-8i -1.2611678239469597E-6+2.7189148708465573E-7i -1.8082460269951264E-4 1.4307487373239433E-4 7.500000000000001E-8 -2.144418108332192E-7-9.562159808464374E-8i 9.916067313043199E-8+4.137566726345951E-8i -1.1799737959364644E-6+3.238482030351463E-7i -1.8259491983806504E-4 1.4088515246175082E-4 7.500000000000001E-8 -2.571618966307394E-7-1.1523765939125452E-7i 6.757567060776197E-8+2.7799072048595967E-8i -1.211799500777852E-6+3.0652407888528346E-7i -1.6683755050666215E-4 1.6074545813395154E-4 0 3.504370801741788E-9-2.7674228856149987E-9i -8.379966409446013E-9+7.884136360744895E-9i -1.3229374771411188E-6+2.7348222507775435E-7i -1.656969181648447E-4 1.585467620943773E-4 0 2.838759858378178E-9-3.2234019475598417E-9i -6.668346368529335E-9+1.1501933982795606E-8i -1.396157927661519E-6+2.5906764308110725E-7i -1.6773290923599688E-4 1.568428023371782E-4 2.088780244763121E-6 -3.4762202905109446E-8-3.4661965764712483E-9i 8.77953961823405E-8+4.823650149005026E-8i -1.4013409790669179E-6+2.5540555752490003E-7i -1.6874100625347585E-4 1.5860038672487723E-4 0 2.7947780314484067E-9-2.979057017387042E-9i -5.216972399876947E-9+1.2257276943822408E-8i -1.3481808781667433E-6+2.567798668796538E-7i -1.6677871984058587E-4 1.5452932368798878E-4 9.753407194136403E-7 -2.5700671483381762E-8-7.641694632080473E-9i 2.42216992347625E-7+1.2895692223373058E-7i -1.5592266850908347E-6+2.3080700668594362E-7i -1.6897131676171502E-4 1.5313916831645943E-4 7.500000000000001E-8 -2.2616804699893134E-8-1.3269035668839191E-8i 3.7093846472419697E-7+1.5739495603421874E-7i -1.4080136386342467E-6+2.8516911477731845E-7i -1.6932229418173647E-4 1.5287954363328484E-4 1.8648163160099215E-6 -6.100027938368763E-8-1.535677948014703E-8i 2.5202243596885227E-7+1.1037231926770776E-7i -1.369732121491955E-6+2.911701582310666E-7i -1.6995181044787122E-4 1.510041729335713E-4 7.500000000000001E-8 -5.757100869988041E-8-2.7057604368380465E-8i 3.108997408914939E-7+1.3473708475467487E-7i -1.3047712364540914E-6+3.2350977100890023E-7i -1.6839662794639325E-4 1.54981574222979E-4 1.8174554243791966E-6 -4.190962171514815E-8-7.462394615703418E-9i 1.687810927630171...
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This document was uploaded on 01/24/2014.

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