H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 000000002E-8 -2.982976628603965E-9-1.0723660360494641E-8i -9.076724703280609E-7+6.011032515894662E-7i -2.312527691317371E-5+5.639319715065583E-6i -2.573385780391249E-5 6.999999999999999E-6 7.5E-8 -3.6349135528904574E-8+2.471794156756151E-9i -1.6319303890872992E-6+7.033423496403985E-7i -2.9721634748024364E-5+7.5496003105236105E-6i -2.615962132583478E-5 6.999999999999998E-6 0 4.0656936366179064E-8-4.732600687035182E-8i 2.0572835468364446E-6-7.222509747151088E-7i -2.810155683317237E-5+7.070397360139369E-6i -2.7466048996896934E-5 6.999999999999999E-6 7.500000000000001E-8 -5.791748367370026E-8+9.636629123149776E-9i -1.276824188354503E-6+6.829570877009024E-7i -2.7763788970127354E-5+6.951706145192138E-6i -2.6299892355721783E-5 7.900820971550518E-6 2.872636002008494E-7 -3.0315610797301135E-7+7.636039035547465E-8i 4.242443370678934E-7+4.077756945043004E-9i -2.8252018536361343E-5+7.741154467936183E-6i -3.103403815098668E-5 5.000000000000001E-6 7.500000000000002E-8 1.4614583459586296E-8-2.369895891558441E-8i 1.9812174999842843E-6-1.7053682730648097E-7i -2.228555156911905E-5+7.117041434089694E-6i -3.265818501630648E-5 5.000000000000001E-6 7.500000000000002E-8 1.4361614113223009E-8-7.007682748897774E-9i 2.0337843061391895E-6-1.8995153795882115E-7i -2.0889082700102327E-5+6.688908826080494E-6i -3.2645268914990194E-5 4.999999999999999E-6 0 5.618528786117707E-8-3.9329539104064235E-8i -2.3472572679846924E-6+7.460258682287629E-7i -1.9869534081496767E-5+6.421915806356161E-6i -3.21406407955811E-5 4.198772661698107E-6 1.638306672280978E-7 -5.400791691406899E-8-4.20155110963244E-9i 4.6931872150646084E-7+1.4668322642321296E-8i -2.1683362659492473E-5+6.611619391176974E-6i -3.100083781108656E-5 5.0E-6 0 3.728576750528076E-8-3.335543654183013E-8i -1.4953645611067615E-6+5.119177064026659E-7i -2.1416025263118596E-5+6.871856487441879E-6i -3.087251361313022E-5 3.9249867753262615E-6 9.182823274012185E-8 -7.673617099905605E-8-6.75991513113261E-9i -1.599678471958868E-7+9.849689266445278E-8i -2.2978842938545783E-5+6.908918422059629E-6i -2.9411951288027724E-5 5.0E-6 7.500000000000002E-8 -8.618674780378539E-8-8.471209350118125E-9i 1.8754446699703305E-6-1.0530918081079332E-7i -2.3857994610525774E-5+7.568776665179363E-6i -3.089000097550307E-5 4.216349945895584E-6 4.017923000777287E-7 -3.1152125635550145E-7+7.117118213245677E-8i 4.1107597654752915E-7+4.006297713579025E-8i -2.286325595756457E-5+6.908384941693409E-6i -3.1700780799461556E-5 8.085160399400537E-6 0 4.658368996475581E-8-4.915074663321119E-8i -3.460249183786746E-8+3.4986462280567303E-9i -2.30993200664612E-5+6.133441594384158E-6i -3.106566338265198E-5 6.999999999999999E-6 0 5.860570659321773E-8-3.753107311391113E-8i 2.7107861971388716E-6-9.809203044773371E-7i -2.3606825508894333E-5+5.801006055547713E-6i -2.943031603037958E-5 7.0E-6 0 -9.891644870789011E-8+5.397964088678838E-8i 1.979633296544509E-6-7.332541845934063E-7i -2.478789731872692E-5+6.133968563896512E-6i -2.9197955489841624E-5 7.0E-6 7.500000000000001E-8 -2.3708271913570734E-8-4.61397794970...
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This document was uploaded on 01/24/2014.

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