H_75nm_L1_65um_D_2um_new

3217021535979824e 5 9352196710541538e 5

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Unformatted text preview: 82E-6 -2.448496299305202E-6+5.839604029820505E-7i 3.0997150694576545E-6-7.170873802729824E-7i -1.4797781359066569E-5+4.6578848952001275E-6i 1.8367732152099143E-4 -1.4967455412538507E-4 0 -4.871323890019014E-6+1.013278042232696E-6i 3.0275539791527197E-6-6.769296651054635E-7i -1.5548268121969167E-5+5.132265872337709E-6i 1.7850779241778927E-4 -1.55E-4 0 -1.5781583267808486E-7+4.891411336388485E-8i 3.604730581604274E-6-5.077449382013143E-7i -2.222920310676909E-5+6.310202956102918E-6i 1.7920131284637558E-4 -1.5463818060660892E-4 -1.516002919154841E-6 -1.39551063690381E-6+3.7809496933847997E-7i 4.3547507456524955E-6-9.238315533658021E-7i -1.7262643088697693E-5+5.250375706751925E-6i 1.775885571153391E-4 -1.5316138568609907E-4 0 -1.5313868697586268E-6+3.892502955466345E-7i 9.139206279143032E-6-1.958435294200679E-6i -1.7651500979446032E-5+5.647698271334008E-6i 1.7731949449377695E-4 -1.5458304200548684E-4 -2.0182276426505947E-6 -1.6927025021247615E-6+4.7525049483172893E-7i 5.151751643772432E-6-1.1850698913977316E-6i -1.7377345907208137E-5+5.328264323634775E-6i 1.8024150483566666E-4 -1.5499999999999997E-4 0 -1.4112178681191523E-7+3.883362270640234E-8i 2.687533440633161E-6-2.8269884991272143E-7i -2.0745366403246738E-5+5.8929600828586856E-6i 1.8247891270066808E-4 -1.480747344041672E-4 -2.1338920500535767E-6 -5.617633582078271E-6+1.3693073604877239E-6i 4.442742151228531E-6-1.1519330960658682E-6i -1.5442911811278027E-5+5.084536276064195E-6i 1.7778899070420144E-4 -1.486142648694898E-4 0 -5.388984694303546E-6+1.399084752322366E-6i 7.995713030707619E-6-1.9994801351147506E-6i -1.5068996301150464E-5+5.292760313516734E-6i 1.8018209890611074E-4 -1.4646921291294388E-4 0 -7.333283217268206E-6+1.8252506312167825E-6i 5.944225194239733E-6-1.524037559891278E-6i -1.5171904584589796E-5+5.3315175242063924E-6i 1.795578473769062E-4 -1.4875669852986763E-4 -2.7008033545753994E-6 -5.263117109934046E-6+1.3897258143328457E-6i 6.41011654634472E-6-1.6771564887250318E-6i -1.5022196600349928E-5+5.02959661573283E-6i 1.8217171409432823E-4 -1.4810574655392634E-4 0 -6.121643334892439E-6+1.4017164979516588E-6i 4.2886561879562635E-6-1.0337216864719778E-6i -1.5402464014209044E-5+5.248110368765068E-6i 1.8259856522576278E-4 -1.5113817886712368E-4 -2.0715649922290473E-6 -3.573436305645866E-6+8.579171956725584E-7i 4.067091325150216E-6-9.786789332877553E-7i -1.5056713599768399E-5+4.861362451506658E-6i 1.8266936434836232E-4 -1.529955230052422E-4 0 -1.8611928163829557E-6+3.8573361383225776E-7i 4.212055199205482E-6-8.074609011805738E-7i -1.546877184888217E-5+4.980013127839787E-6i 1.8184004911288274E-4 -1.53545624470561E-4 -1.5775133441483627E-6 -1.9851864493193703E-6+4.876266876864316E-7i 3.931722016247905E-6-8.414909789637715E-7i -1.559666904818041E-5+4.886833306205068E-6i 1.7871973074359406E-4 -1.5130977892434828E-4 0 -3.146071512056571E-6+7.813577253055244E-7i 7.49378320240351E-6-1.6967415080607458E-6i -1.5790226102722018E-5+5.307590571121904E-6i 1.8013510914574878E-4 -1.5078559118498583E-4 -1.87751889...
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This document was uploaded on 01/24/2014.

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