H_75nm_L1_65um_D_2um_new

327190848027096e 6 52405478158096276e 8

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Unformatted text preview: 4.99250399058864E-6i 4.884882483359562E-4-1.1234917263836162E-4i 1.040925901893917E-4 3.0424197096466242E-6 0 -6.657530031914383E-7-6.483922460863896E-9i 1.607784441934786E-5-1.8729351522889237E-6i 5.285846504213206E-4-1.1805480057421279E-4i 9.045492109541842E-5 3.12878272802389E-6 0 -3.061689142058038E-8-9.145068667788803E-8i 1.8899252420295776E-5-2.5431119131946733E-6i 5.644680362892005E-4-1.2770350932290024E-4i 9.133398776629179E-5 4.126687694432581E-6 -1.7090195470262696E-6 4.740017719358098E-6-1.6513131151111002E-6i -8.698553396017055E-5+1.3407556314464825E-5i 5.364182659266322E-4-1.2393976218252198E-4i 9.210975235149272E-5 3.640280873633717E-6 0 1.9353838635135426E-7-9.175633802119917E-8i 1.1860297175993505E-8+9.85910920766523E-8i 5.827111255203691E-4-1.297256069502203E-4i 9.318570415165479E-5 2.3201538819535615E-6 -2.621384699477692E-6 5.737691375139801E-6-1.930287033457847E-6i -4.121945531487698E-5+6.621199206381945E-6i 4.892350947220945E-4-1.1515241981883784E-4i 9.207621740082235E-5 1.3971047453937419E-6 0 3.5392862362892645E-8-9.944659961913089E-8i -4.051344408092431E-7+7.0291977166254E-8i 5.13511332582017E-4-1.193160830970608E-4i 8.190395188313054E-5 -1.270474586896115E-6 0 -1.3149028740287926E-7-6.93560799471368E-8i 3.248357394755993E-7-7.143871688851191E-8i 5.423263678695536E-4-1.2907162626686334E-4i 7.983139114420207E-5 -2.31053674863047E-6 -1.484861212940442E-6 7.523796476412621E-6-2.400379177267912E-6i 3.416628732585506E-5-6.03242022538993E-6i 5.554462133698923E-4-1.3269991778760057E-4i 8.008550850034603E-5 -3.1146816230628134E-6 0 2.7995997387009197E-7-1.1631824357039022E-7i -1.1049673283092255E-5+1.640677677550162E-6i 5.885635043173208E-4-1.3843546818806868E-4i 7.885866799106528E-5 -1.0985629885640205E-6 0 2.877817151644305E-7-1.404878809238167E-7i 3.891253546070958E-8-9.29506040589104E-9i 5.576433183547339E-4-1.336547067931836E-4i 7.785107314651232E-5 -2.9824730547510744E-6 -2.285370641876256E-6 1.250778327602988E-5-3.989318814537598E-6i 6.144979251485302E-5-1.1157822394616066E-5i 5.557519212717188E-4-1.3417998914337016E-4i 7.974015314957861E-5 1.163256898903018E-6 0 2.2827270270697753E-7-1.3536121594159843E-7i 6.876617887896508E-7-1.244905047714795E-7i 5.520129739242469E-4-1.320896995090976E-4i 9.723808998063764E-5 -3.126117691998315E-6 0 -1.514341490982396E-7-7.326147052344468E-8i -5.317150720067845E-6+6.549428915338801E-7i 5.362479034034084E-4-1.2104220575384072E-4i 9.690998489539577E-5 -1.7485100412654944E-6 -1.5849442572278942E-6 2.609035172650897E-6-9.355558447130383E-7i 2.0346789988472162E-5-3.1525341120906825E-6i 4.95032817369653E-4-1.1481809739610622E-4i 9.483810983142301E-5 -2.8826689626449425E-6 -1.0500170046871597E-6 2.7533440656467444E-6-8.444127891607225E-7i 2.7845808106947205E-5-4.2575530885022615E-6i 5.24526509801948E-4-1.20082150369627E-4i 9.556059853267888E-5 -3.6116472872701057E-6 0 1.530314257684277E-6-2.99190683783479E-7i 3.5519326209154656E-6-5.174342481397945E-7i 5.629129667685966E-4-1.2536291982202083E-4i...
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This document was uploaded on 01/24/2014.

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