H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 9021866E-8+4.1057008024851055E-10i -7.739061987357936E-5+2.354985138725933E-5i 3.0343277902638223E-5 6.241097653897442E-5 0 -2.2342441329675777E-7+3.5980172850835765E-8i 1.0934945439411425E-8+2.711402821986564E-8i -8.791094967373714E-5+2.6861938600514716E-5i 3.299916130213198E-5 7.686113924432562E-5 2.8406198553249207E-6 -1.772580965550106E-5+5.431807075546192E-6i 4.484850134633198E-6-1.3223445842201936E-6i -7.224752919165777E-5+2.239466183604579E-5i 2.9894104803922528E-5 7.618791782589903E-5 0 6.853547184294086E-7-2.292124146221917E-7i -2.7067338369045742E-8+3.655889128284121E-8i -6.396088553272937E-5+1.9752444774002256E-5i 3.39683439146017E-5 7.235944992951392E-5 2.1259187299174687E-6 -1.9566540866868913E-5+5.932694593539326E-6i 4.265441990873818E-6-1.2423493225425612E-6i -9.04838342969255E-5+2.7913939551291584E-5i 3.0117828504213412E-5 6.807111469421419E-5 0 3.7959179087082574E-7-1.4263205604381214E-7i -1.691391831371014E-7+7.852667515406697E-8i -7.660380144663096E-5+2.352748118432149E-5i 3.190231235667181E-5 6.839035010125734E-5 2.1461228196591123E-6 -1.3684434298523368E-5+4.178870947944958E-6i 3.712692170747064E-6-1.0666372695873941E-6i -8.335505500748062E-5+2.5638976625082482E-5i 3.138069202628169E-5 7.17626737147796E-5 0 3.9085104475145016E-7-1.4486573353955645E-7i -1.9447990575183206E-7+8.855474530680696E-8i -7.764801932483791E-5+2.391826637619668E-5i 3.275222937542507E-5 5.5408610570020245E-5 3.7488849775255664E-6 -3.527799290281488E-5+1.0691289571775615E-5i 1.0156258618007888E-5-2.8860538062588475E-6i -1.0984202981826096E-4+3.3414066864983476E-5i 2.5057460763397692E-5 5.495115608017051E-5 0 8.85723388417061E-7-3.0012750255754966E-7i -3.251156239478784E-7+1.2435876570403417E-7i -7.595960063257526E-5+2.2941568165703456E-5i 3.0057792967941466E-5 5.943777324458255E-5 3.089948659245075E-6 -1.721590208245579E-5+5.25120090499832E-6i 5.87644554697416E-6-1.6659699287421436E-6i -8.797400830403008E-5+2.681221540312735E-5i 2.579628569790193E-5 7.099459386000947E-5 0 7.438060853706258E-7-2.5079356309369264E-7i -1.776809701333567E-7+7.81932398080131E-8i -5.6859369842290926E-5+1.7458120341343472E-5i 2.6902312262655262E-5 6.487924503374254E-5 0 -6.994988520125549E-8-1.543581350078337E-9i -1.2498634086086732E-7+6.49465014823658E-8i -6.753720895276587E-5+2.064540626151338E-5i 2.7689534215907973E-5 5.3174056136363064E-5 2.9802885525770616E-6 -1.460755605347685E-5+4.42866798184715E-6i 5.949728275253289E-6-1.665712178913118E-6i -8.804175149774596E-5+2.6589252155929623E-5i 2.6429116146519493E-5 5.033000577992946E-5 0 1.1433368202740165E-6-3.774041930369479E-7i -3.4255119765474726E-7+1.2316794854405448E-7i -9.238608558185609E-5+2.7757489122251177E-5i 2.1119775932177592E-5 5.018617743705231E-5 0 8.041294918392089E-7-2.765427434634621E-7i -4.1539018515342196E-7+1.4643222504126183E-7i -7.052040159527949E-5+2.1110366538218224E-5i 4.4289068454637143E-5 5.6925109533393695E-5 7.500000000000001E-8 -1.5989240536805235E-4+5.0516663271482295E-5i 3.307622427961142E-5-9.65902167821550...
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This document was uploaded on 01/24/2014.

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