H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 6-6.615623904438836E-7i -2.762745443601645E-7+8.036919483727351E-8i 4.227774369084551E-7-1.012905193593038E-7i -1.3606609482734035E-4 3.732837438074471E-5 -1.8446756984773037E-4 1.6789727741445833E-6-5.061090257258484E-7i -2.559650327495714E-7+7.402980430921797E-8i 1.9576775053123752E-7-3.7631661203538646E-8i -1.5025895195399776E-4 4.903408435310002E-5 -1.9999999999999998E-4 1.3617074547372115E-6-4.0972020072854434E-7i -2.5724578360930575E-7+7.429187905858866E-8i 1.710333284333521E-7-3.52055527547296E-8i -1.4786669017738624E-4 2.614847780459448E-5 -1.9999999999999998E-4 1.438074693359162E-6-4.3271937383552344E-7i -1.4584874799721047E-7+4.215856423628715E-8i 2.109534215844871E-7-4.630669815625164E-8i -1.5602205792888661E-4 3.215125690290026E-5 -1.8070817183648928E-4 1.45767673472061E-6-4.360834769194477E-7i -1.7585691112223123E-7+5.0520879314961615E-8i 3.30624946463169E-8+9.910573388902828E-9i -2.2466195031573666E-4 -1.4253953692239615E-5 -1.9999999999999998E-4 7.998791022876802E-7-2.3569556663185228E-7i 3.432969440578329E-8-9.75635086164061E-9i -9.057556106081111E-8+3.6425092820636337E-8i -1.7387053450373268E-4 1.3213803067764208E-5 -1.9999999999999998E-4 1.1918383326743643E-6-3.5586175173840363E-7i -5.466986720365948E-8+1.5701016758899164E-8i 6.339453985639241E-8-4.307260187367316E-9i -1.6060222922673883E-4 5.5009220771400904E-6 -1.7925602978255016E-4 1.4452342055683793E-6-4.314107269045733E-7i -2.869348517334072E-8+8.236071869671029E-9i 6.890686609194474E-9+1.791477637134146E-8i -1.7735634088431756E-4 2.1360646984307026E-5 -1.7312115230484656E-4 1.2609016016708345E-6-3.733916714743025E-7i -9.330631623128651E-8+2.659614150203745E-8i -1.1364194937656555E-7+5.2343517681325685E-8i -1.9915190757749366E-4 7.415094250095666E-8 -1.9999999999999998E-4 9.805769380477404E-7-2.907216386100431E-7i -6.654670044297796E-10+1.9630307400601522E-10i -3.081522267207499E-8+2.124885532358675E-8i -1.9798760048981082E-4 4.4025831308536275E-6 -1.7418131145156753E-4 1.0568429921640087E-6-3.1075550691688195E-7i -1.5033540572175897E-8+4.25954337746422E-9i -1.6189189382615143E-7+6.332422238648932E-8i -1.821983892539029E-4 -1.1515390874603986E-5 -1.8125000000000001E-4 1.1862986843114236E-6-3.5156877319527875E-7i 4.761844504423572E-8-1.3597304018329049E-8i -7.614338643365345E-8+3.914198504190195E-8i -2.1137374512091755E-4 -9.216497712261588E-6 -1.78489949441438E-4 9.32470439830159E-7-2.735500558081279E-7i 2.6432207711111854E-8-7.484465889453086E-9i -1.6319641144754927E-7+6.122158880632825E-8i -1.9938709404101898E-4 -2.923693714243798E-5 -1.9999999999999998E-4 9.641838092801515E-7-2.8590132315598924E-7i 9.086781848571092E-8-2.5935890385864165E-8i -3.575592513507365E-8+2.249946379937072E-8i -2.0904560717568136E-4 -3.023355059788965E-5 -1.7506082776263485E-4 9.407225127025271E-7-2.7581249693486744E-7i 8.894318449334305E-8-2.5134755710755293E-8i -1.795867585666096E-7+6.64995976940599E-8i -2.1138390921698582E-4 -5.2341406164772814E-5 -1.7511656642674395E-4 8.923420951098464E-7-2.6164...
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This document was uploaded on 01/24/2014.

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