H_75nm_L1_65um_D_2um_new

409851913536146e 5 2407725785121852e 6

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Unformatted text preview: 26467175E-6i 5.31487823236921E-4-1.1961237661004604E-4i 1.2792522771884699E-4 5.820266218100566E-6 9.990549054025292E-7 4.757204935120688E-6-1.2970749260594775E-6i 2.1336401118584507E-4-3.0054083550556943E-5i 5.602193324082106E-4-1.2800301013451762E-4i 1.2808197050851372E-4 6.121170947339351E-6 7.5E-8 2.2745211446961734E-6-7.063298069764912E-7i 3.094137042552347E-4-4.279393918693586E-5i 5.384391725506077E-4-1.2806510222201385E-4i 1.2960931604652466E-4 6.557030737573496E-6 7.500000000000001E-8 3.655620629094969E-6-1.0794864444552132E-6i 3.1011298715566404E-4-4.4599337986284127E-5i 5.124303206056336E-4-1.2535331320781383E-4i 1.2651489999823717E-4 6.582274532954108E-6 7.500000000000001E-8 3.4560821994822355E-6-9.391950375562766E-7i 2.977679738357432E-4-4.2115119149107226E-5i 5.148367956348532E-4-1.2447406420678395E-4i 1.280542032389453E-4 7.79544252802894E-6 7.5E-8 3.823361744583383E-6-1.4033283922687545E-6i 2.9588969049866576E-4-4.530029883716147E-5i 4.555348772085027E-4-1.1735155035206997E-4i 1.2556540958364213E-4 4.999999999999999E-6 7.499999999999998E-8 3.470067996790005E-6-7.269529783526796E-7i 9.704382733229692E-5-9.951606061112314E-6i 7.068883526250134E-4-1.446216065589028E-4i 1.2725079887894683E-4 3.491483330999778E-6 1.5425821589574332E-6 2.8035384393423505E-6-1.0271691209450976E-6i 5.072768797006426E-5-7.6272106782745585E-6i 5.22287544596055E-4-1.1924010885953708E-4i 1.229749825556257E-4 -3.11718110833386E-6 0 4.495831014571393E-7-8.486447310317323E-8i 1.7449480221075496E-5-1.9982319882958264E-6i 5.218147606901742E-4-1.1800636919866881E-4i 1.24587048488189E-4 -4.0896139094577164E-6 3.535572248650188E-7 2.936374897458821E-6-6.328374805367187E-7i -4.72355975477054E-5+5.932507955712374E-6i 5.905362273664495E-4-1.275628179390649E-4i 1.2477514295217848E-4 -3.0735905575130233E-6 0 1.0529537058767691E-6-1.9183612344209066E-7i 8.582649321814406E-6-1.0403257467650474E-6i 5.250763252514794E-4-1.1880351091265793E-4i 1.2553999912925812E-4 -5.000000000000002E-6 0 9.769669280853867E-7-1.7915006343971937E-7i -3.1465700747951E-5+8.598548157214E-6i 7.210464555254042E-4-1.4288188585700906E-4i 1.2643758426435074E-4 -3.6196264785938893E-6 0 9.108702198775752E-7-9.217822767826998E-8i 3.951896816482591E-6-4.655974837048154E-7i 5.5481193239941E-4-1.2346556729326275E-4i 1.2335343036076933E-4 -4.099491387354968E-6 2.0697696465549309E-7 7.958081594150457E-6-1.0237677658212856E-6i -3.9862389790273435E-5+5.832909778469749E-6i 5.945662372822125E-4-1.2748795458095152E-4i 1.2537321218303944E-4 1.160434711257194E-6 0 -7.547848060848342E-8-5.298568730993658E-8i 1.17587643519038E-7-3.6529688956272414E-8i 5.009334404157053E-4-1.1510225768625438E-4i 1.0669103261870136E-4 4.9999999999999996E-6 7.5E-8 1.2528287474746134E-6-2.879543700627453E-7i 8.595716056733458E-5-7.862263367901339E-6i 7.066409186670914E-4-1.418364696715137E-4i 1.0588739413615297E-4 3.1483489674584365E-6 0 3.8536370231915623E-7-7.681866176501018E-8i -1.0954051154606534E-5+1.2233174767802464E-6i 5.144878030726017E-4-1.1623530884...
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This document was uploaded on 01/24/2014.

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