H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 489302053E-7+6.082742872927805E-8i -1.4596117374867235E-5+3.6324008997797935E-6i -4.5704949223469014E-5 -3.074257134271928E-6 0 1.53526627254736E-8-1.0229383760238778E-8i 2.035134903071144E-9-3.8635209517596495E-8i -1.4947965973067288E-5+4.005608523949607E-6i -4.7481632364998285E-5 -3.1182061153928263E-6 0 1.0863013410964878E-8+1.3237715562743968E-8i -6.874455497648703E-8-7.549599496058622E-8i -1.4344136302495761E-5+3.751291363769697E-6i -4.060204594690873E-5 3.1014731767438364E-6 0 4.2197441466799244E-8-3.422334837803838E-8i 5.836089753144002E-8-9.230274408048663E-9i -1.7094152113187402E-5+4.805807862655118E-6i -4.398848737569892E-5 -3.648200997633037E-6 0 3.8123888228291415E-8-2.3077217764828713E-8i 4.681786717198787E-8-2.2429889010981942E-8i -1.5628955270211377E-5+4.203757481430596E-6i -3.7000000000000005E-5 -5.0E-6 0 -2.8405419232793984E-7+5.1902703534908605E-8i 1.7304562191187988E-6-6.229101333239949E-7i -1.712836276555165E-5+5.385415004296556E-6i -3.796669813307713E-5 -3.780459713257256E-6 0 -9.281150145104964E-8-1.4717911237405873E-8i 1.3062027814203368E-7-9.920576432324505E-9i -1.843675323141009E-5+5.29400492782278E-6i -3.8201967974279415E-5 -5.000000000000001E-6 0 -3.978211345060922E-8-1.2478892021207272E-8i 1.7995653739782157E-6-6.658309668948772E-7i -1.6963574869767576E-5+5.046004889955787E-6i -3.820141719789071E-5 -5.000000000000002E-6 7.5E-8 1.4200755565995978E-7-2.2879602150855803E-8i -1.6321219318600534E-6+2.561051880952992E-7i -1.7590015593604532E-5+5.208907436674862E-6i -3.695602849426152E-5 -3.430673158178843E-6 0 -5.221236924670553E-9-2.687119776616058E-8i 1.2214606216039726E-7-1.8303500460246925E-8i -1.898268846237163E-5+5.495211317087066E-6i -3.76997488010891E-5 -4.592691848071114E-6 7.63644620677215E-8 1.0923179770590263E-7-2.0831907435181485E-8i -7.804170819129819E-8-6.534432319543759E-8i -1.7621823901344494E-5+5.257558315637545E-6i -3.763087987338854E-5 -4.590307679027198E-6 2.3045784827088602E-7 -6.04181755927552E-9+1.9646030312119034E-8i -3.5256431685747047E-7-1.2058009343611509E-8i -1.7848667476649035E-5+5.293620638246272E-6i -3.867862875842245E-5 -4.312246155270811E-6 1.0200307871403651E-7 6.372104426706146E-8-2.0451562653036465E-8i 1.0851173347370402E-7-6.422907438893843E-8i -1.757575588393523E-5+5.07996831944257E-6i -4.321417485684211E-5 -5.000000000000001E-6 0 5.801893558020051E-8-2.4159131231697743E-8i 1.3001620693038098E-6-4.957548404724437E-7i -1.571670770694262E-5+3.922057060060284E-6i -4.2348593450894636E-5 -3.1963056747764398E-6 0 2.7262809436812836E-8-2.9971112343546525E-8i 1.3854611217805312E-8-4.189165504807704E-8i -1.629052691055418E-5+4.511333745331535E-6i -4.2932916614415203E-5 -4.086889750235397E-6 7.304693745317089E-8 -2.3241370906480242E-8+1.9161720165227977E-8i -2.6741394452054997E-7+1.005902415512211E-7i -1.6049620364935002E-5+4.2663236192212E-6i -4.490823916574005E-5 -5.000000000000001E-6 7.5E-8 4.674989657577513E-9+8.436578415720142E-9i -4.637008811635948E-7+3.6367577153037545E-7i -1.56987327821309E-5+3.74631351648549...
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This document was uploaded on 01/24/2014.

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