H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 51877813E-6i 4.2739245235327554E-5 -3.058951758810341E-5 7.500000000000001E-8 -3.7860223611191346E-4+1.1326235572358308E-4i -9.633310718885439E-5+2.6672065979477244E-5i -1.4986380558953364E-4+4.7935165299923205E-5i 4.0051303302147395E-5 -3.073942379096976E-5 3.986457896588694E-6 -2.5036578159755773E-4+7.378338316531214E-5i -7.860306203966257E-5+2.162895758848032E-5i -1.8570011732152163E-4+5.587732002624522E-5i 4.526467142456688E-5 -3.312796854338219E-5 3.5782911939323696E-6 -2.61438528472367E-4+7.997120832735498E-5i -1.1205696582939926E-4+3.122109904240791E-5i -7.907910892821909E-5+2.4676057947548156E-5i 4.3312547422282825E-5 -2.721093251404876E-5 4.655872697393196E-6 -2.9850516878717956E-4+8.896949096166171E-5i -1.384354335723062E-4+3.807646597471058E-5i -1.1204055461908448E-4+3.403568626966063E-5i 4.1200993252282416E-5 -3.496319050654553E-5 2.943729365825194E-6 -2.489617308203641E-4+7.428441491401994E-5i -6.563522982796653E-5+1.8204918315005056E-5i -1.5976726705301298E-4+4.9144056004820094E-5i 2.0801701495803726E-6 -1.533255859994666E-5 0 8.63268808340336E-7-2.8301312765821597E-7i 9.059586462033947E-7-2.60695571275768E-7i -1.4132116532862283E-4+3.9708179645869815E-5i 2.30081345456286E-6 -1.5069283645821956E-5 1.9147666044391547E-6 -2.0839197375027995E-5+5.743227605766593E-6i -2.3856629371746898E-5+6.545580677516649E-6i -1.4343073586919886E-4+4.029515073313931E-5i -5.906542256815155E-7 -1.632437019964255E-5 0 1.1744934083566156E-6-3.648740523887195E-7i 1.0862574693912622E-6-3.050637602695569E-7i -1.0727312426515423E-4+3.026899044507874E-5i 2.0699505941088368E-6 -1.7650189504892893E-5 0 6.628422984482352E-7-2.2349632395457123E-7i 3.610123029714823E-7-1.1096309758177935E-7i -1.1734626210411769E-4+3.311769282074371E-5i 4.727560119611809E-6 -1.6104172846951453E-5 0 6.710168113481301E-7-2.2939037635418686E-7i 1.7546295668337265E-6-4.985131167117851E-7i -1.6276159329806542E-4+4.569013513693114E-5i 4.424415961890824E-6 -2.066711421584041E-5 0 1.4590077289241305E-6-4.3947306047822177E-7i 5.874706892377903E-7-1.7552426106935945E-7i -1.0722495094910275E-4+3.0410027671142808E-5i 2.393954988870288E-5 -1.7480594064752603E-5 6.3541719800645326E-6 -5.6513275819180076E-5+1.613864256524439E-5i -1.4118905987056438E-4+3.873875769344788E-5i -2.1311418033650062E-4+6.0550206533379206E-5i 2.0331864549312748E-5 -2.1804436703196876E-5 0 3.3923563985243286E-6-9.889650785174786E-7i 7.1328298094682175E-6-1.984536772981401E-6i -1.962248334196129E-4+5.5738946349566616E-5i 2.3588526083660174E-5 -2.5459650351197945E-5 0 1.2235016206297569E-6-3.8096829390633913E-7i 3.632802499401995E-6-1.0211997505221422E-6i -1.7731110698219685E-4+5.086413471777282E-5i -3.7250434218518303E-6 -1.6883277087497892E-5 0 1.0192140741036027E-6-3.189904971747509E-7i 6.587514602513986E-7-1.8418971082720392E-7i -8.222197510301087E-5+2.3297763807555646E-5i -4.475134315040684E-6 -1.4721602661756813E-5 2.6753362546694724E-6 -1.6897040887677597E-5+4.6743191842953515E-6i -1.0699200196657541E-5+2.9361476858674517E-6i -8.3609250599198...
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This document was uploaded on 01/24/2014.

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