H_75nm_L1_65um_D_2um_new

44459279149195e 4 4424377436590522e 8

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Unformatted text preview: 6i 1.7027038758803405E-4 1.4707242295346513E-4 5.328474011440336E-6 6.33286133438616E-6-1.9200365903488533E-6i 1.192680597602872E-5-3.4640869790593273E-6i -1.4541166242962659E-5+4.945824329898735E-6i 1.632135568870189E-4 1.6122941441823726E-4 4.589983347590251E-6 1.158825036583679E-6-3.573796971937383E-7i 3.919916512091099E-6-1.1723782234809854E-6i -1.6084415493374746E-5+4.979292884036195E-6i 1.6437734088299108E-4 1.6575823183977904E-4 0 -2.7634604147409655E-8+2.1389198003574936E-8i -4.745872744076303E-8-7.006402304819905E-9i -1.3742452903576636E-5+4.263335483777587E-6i 1.6949876658066038E-4 1.6283608697089278E-4 4.863841718668198E-6 1.1015282436738666E-6-3.3397339178555915E-7i 2.848304884671757E-6-8.586389679741722E-7i -1.3599573091926946E-5+4.210730471509106E-6i 1.62818383067339E-4 1.6833124971369384E-4 4.762595964031809E-6 6.642374728787264E-7-2.0251776060826568E-7i 2.082228433081872E-6-6.509703405545171E-7i -1.2319378552980375E-5+3.841915831272728E-6i 1.6673133109707327E-4 1.7221686963380824E-4 0 -5.104582742013631E-10+1.0890678495340586E-8i 4.2473074369456675E-9-1.638846657120159E-8i -1.068126355417768E-5+3.3297145784385083E-6i 1.6091097765308794E-4 1.6927332451605406E-4 0 -1.568603723623084E-8+1.751532408050419E-8i -1.3776339047707634E-10-1.4419284338960749E-8i -1.2524071365371814E-5+3.9067441435384054E-6i 1.5890643430981378E-4 1.7572926348629776E-4 0 4.794861684266779E-9+9.71344943371482E-9i 1.3574782966544602E-9-1.2820208003556701E-8i -1.0474878475936685E-5+3.277383038552729E-6i 1.751290333195912E-4 1.7411964152242438E-4 0 -1.0581246908987433E-8+1.1422031187864454E-8i 6.856093701170112E-9-1.702915493404783E-8i -9.215225051571606E-6+2.8681845802066704E-6i 1.8614184365905691E-4 1.8336994758763316E-4 0 -4.4316949164850855E-8+1.901753072697778E-8i -5.334232126239883E-8+4.454897338870834E-9i -6.603535464475938E-6+2.0544036661756714E-6i 1.7311078967908693E-4 1.6840566462065793E-4 5.072593044755006E-6 7.708483642060506E-7-2.3267677738171566E-7i 1.7585836981235416E-6-5.493607615116719E-7i -1.0789599862925011E-5+3.352743896979475E-6i 1.229164478107321E-4 1.679195234668491E-4 6.239037874816361E-6 2.9322481240424855E-7-8.184318596489668E-8i 4.4367371940513415E-6-1.411299774171521E-6i -1.602020060415136E-5+5.0739859396745355E-6i 1.302096195755373E-4 1.772071068916114E-4 0 -5.006953629358871E-9+1.4935545974956366E-8i -8.432103215612113E-8+2.1031590734900705E-8i -1.2012089540973578E-5+3.7906101344380557E-6i 1.3072509605016665E-4 1.6651316578518874E-4 8.621379792989698E-6 6.101343845648772E-7-1.8969534088140038E-7i 6.04223721045372E-6-1.917415797762482E-6i -1.5519206457534044E-5+4.913053560289255E-6i 1.4063280066394814E-4 1.7557079745377261E-4 0 -5.938127033586457E-8+3.241316832045235E-8i -3.325253094069106E-7+9.593888591518208E-8i -1.193825447472081E-5+3.7584976902191765E-6i 1.503180177833676E-4 1.7614812882834867E-4 0 -3.340120084752152E-8+2.255872689968519E-8i 5.422820660953842E-8-2.6712963639707876E-8i -1.1020309382479831E-5+3.4592220158190247E-6i 1.4804754924401423E-...
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This document was uploaded on 01/24/2014.

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