H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 474367090131846E-6 -9.649588104318023E-8+6.181472336659148E-8i 1.3094152960466585E-7-1.534357292089228E-8i -5.4934132038948525E-6+1.5336608870300478E-6i -2.9514432351609262E-5 1.4310520047966974E-4 0 4.0669227707734734E-9-1.896887040299587E-9i -1.231365069631618E-8+1.591405287509102E-8i -5.690923388005963E-6+1.6086406105628088E-6i -3.0613181143813924E-5 1.4077273873803103E-4 0 1.128874349667534E-9-3.790278313898413E-9i -1.2639311761905208E-8+1.488384010077019E-8i -5.801138898819836E-6+1.612334931622182E-6i 3.565000347069775E-5 8.586827006774402E-5 0 3.0229583683039072E-6-8.861327007484802E-7i -3.830882851080242E-8+4.9169705818955894E-8i -8.948101855759064E-5+2.7540379003547168E-5i 3.7E-5 9.978491588987876E-5 7.500000000000002E-8 -1.802171101319447E-5+4.7425725826065975E-6i -1.3634106384163847E-7+6.39058059387354E-8i -1.0452769277033414E-4+3.123313135667269E-5i 3.699999999999999E-5 1.0899313317712867E-4 0 -2.2675329632996702E-6+6.981306595707228E-7i -6.500639379292128E-7+1.9288556146052072E-7i -8.54714460541924E-5+2.5034918129162898E-5i 3.7E-5 1.0845202929465616E-4 7.500000000000002E-8 -1.2904647071137347E-5+3.2643538621833388E-6i -4.5250304336885705E-8+4.116314686331002E-8i -8.569257602577618E-5+2.5322432843547123E-5i 3.62345612744346E-5 1.0896437375481403E-4 1.7469516165843094E-7 -5.637702791042032E-6+1.56856293885288E-6i 6.766999462781698E-7-1.6472699870817564E-7i -6.375265176875069E-5+1.9135796304500795E-5i 3.7E-5 1.0214920756163731E-4 0 -4.3079180082162204E-7+1.998677912235191E-7i -1.1139210847610492E-6+3.2535853245844554E-7i -9.744479833964186E-5+2.891128742330921E-5i 3.536408043674147E-5 1.0112658828878648E-4 0 2.799173972662753E-6-7.891217174519719E-7i -9.71620215071504E-8+6.442676211045513E-8i -5.9223661657622415E-5+1.824957062437569E-5i 3.7E-5 1.0043822615776448E-4 0 -2.113105952671568E-6+6.54987979678477E-7i -2.0541118342422746E-6+5.850927045497611E-7i -1.0389656508898171E-4+3.0825347270548496E-5i 3.7000000000000005E-5 1.0151850757270086E-4 7.500000000000001E-8 -1.7487685175134346E-5+4.63520600556457E-6i -1.892190070801942E-7+7.796300848116209E-8i -9.77675291062115E-5+2.9228557882556444E-5i 3.6144244568489434E-5 1.0042262423915746E-4 1.1102887231693198E-7 -6.805793432373974E-6+1.9356273063264595E-6i 1.8545874546638252E-6-4.849062749112676E-7i -7.600529996663191E-5+2.302943256010659E-5i 3.7E-5 1.0325036518819902E-4 7.500000000000001E-8 -1.2939812076196264E-5+3.309503975262654E-6i -1.8223792912021507E-7+6.665415117465148E-8i -9.837773025311869E-5+2.926379952835711E-5i 3.621077740213361E-5 1.0214137455924981E-4 9.149126517174812E-8 -7.290066221399272E-6+2.0306873766529064E-6i 1.0427149163105831E-6-2.69422987142498E-7i -7.479458889845698E-5+2.2595842995529193E-5i 3.528907814160476E-5 1.0808583458280081E-4 0 3.699071655071653E-6-1.01606782345969E-6i -1.6111741629049048E-7+7.706083372891609E-8i -5.1739698526989154E-5+1.583286272867617E-5i 3.7E-5 1.0728215177325584E-4 0 -2.5402644501720752E-6+7.474756147408472E-7i -5.065385877828232E-7+1.7801190699736255E-7...
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This document was uploaded on 01/24/2014.

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