H_75nm_L1_65um_D_2um_new

4948460887324166e 5 12432467118330578e 4

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Unformatted text preview: 635E-8i 9.783694055531978E-8-3.2354829306318553E-9i -1.425662689719125E-6+3.4736220162530857E-7i -1.6721956733993425E-4 -1.840149538229418E-4 0 1.0234489420072802E-9-2.805395871481487E-9i 1.7129631290093492E-9-4.53593897376173E-9i -1.0741620610413716E-6+2.8574461863953294E-7i -1.6770651034694152E-4 -1.7180178205315595E-4 -7.621518287770753E-6 8.176972059554839E-8-1.835970958105055E-8i 7.050691532541479E-8-6.185716227164238E-9i -1.1556263954250644E-6+2.9207143136132985E-7i -1.6254025590629529E-4 -1.769345583050849E-4 -8.189962574835232E-6 8.52399384402067E-8-2.0940593288611658E-8i 7.31391426302666E-8-8.877624186557492E-9i -1.165235577906957E-6+3.010618032867114E-7i -1.7575333761320148E-4 -1.7984750552834647E-4 -1.0393414543213684E-5 9.140964818421188E-8-2.2774745062417933E-8i 6.885003139675036E-8-1.1345538888322825E-8i -1.0172432761135973E-6+2.7130941542499477E-7i -1.5758152112565221E-4 -1.7476148781556502E-4 0 1.7175098339524374E-9-2.9784351957584813E-9i 1.0342963630588014E-9-6.1406696714422726E-9i -1.247722480121998E-6+3.1244629850656645E-7i -1.432225380634429E-4 -1.7824247485061549E-4 -7.970168677880787E-6 9.514452633837009E-8-2.5377590068255112E-8i 9.184541520393711E-8-1.0329273185732839E-8i -1.3612486838060214E-6+3.498620838346675E-7i -1.4946431862751115E-4 -1.754599697345403E-4 0 1.6064428614749836E-9-2.8460908192912485E-9i 1.4338344163598398E-9-6.051878257752087E-9i -1.332334821108575E-6+3.327222607518431E-7i -1.5387747870737747E-4 -1.7593281883417127E-4 -7.81262443958203E-6 8.798008289661162E-8-2.2173739186312474E-8i 8.135383147464399E-8-8.25074502413914E-9i -1.2649197126937497E-6+3.2255100873126746E-7i -1.5520430111347794E-4 -1.829190725336872E-4 0 1.768701822121801E-9-2.4528577278528957E-9i 1.9260561456126244E-9-4.923734912916832E-9i -1.196829378941209E-6+3.136564076513734E-7i -1.5631902835805425E-4 -1.8253834576471424E-4 -1.255060658926667E-5 1.2440594899335848E-7-3.251958596370344E-8i 1.05868623333055E-7-1.5506801668783632E-8i -1.1698267728228998E-6+3.120320412501309E-7i -2.1761075215236396E-4 -1.1628637807816825E-4 0 6.193616618730067E-10-4.149099706843273E-9i 6.539114880457339E-11-7.311031369965605E-10i -9.505200809276497E-7+2.3808212457218976E-7i -2.2576407350045154E-4 -1.1920370162709592E-4 -1.1776046242300018E-5 9.724801552274509E-8-1.9886473400471214E-8i 3.389224223862721E-8-6.681698626304729E-9i -8.604159078382799E-7+2.2568055313789417E-7i -2.1743260462422592E-4 -1.0770060818338889E-4 -9.76094225514377E-6 1.0115174472794601E-7-1.6579438898606305E-8i 3.0769241456586734E-8-5.45003629353152E-9i -9.69497565677388E-7+2.4350667249807987E-7i -2.3655826854437003E-4 -1.094346311783058E-4 0 -1.2769066009836092E-10-3.055352710381813E-9i 3.128957521700222E-11-6.265909314225664E-10i -8.08081587881761E-7+2.1479122835885905E-7i -2.1890099276513467E-4 -8.300036289323953E-5 0 1.88980834059347E-9-3.6517188141850125E-9i 1.1368914538887689E-10-3.3827629747109417E-10i -1.0327183991384048E-6+2.5240210550923475E-7i -2.2157813021464026E-4 -9.6724842902755...
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This document was uploaded on 01/24/2014.

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