H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 0683988E-4 -4.903133444742618E-5 -1.4327124099862924E-6 -7.527519288057795E-5+2.2165583520063203E-5i 8.335961573017016E-6-2.3615695830877326E-6i -1.9830090672366243E-4+6.00583260697613E-5i 1.8885479167198336E-4 -4.689549914080714E-5 0 5.457269732565828E-6-1.6210780803382896E-6i -9.984609010693646E-8+5.5582288016609026E-8i -1.9300952980688175E-4+5.807742339808954E-5i 1.8700000000000007E-4 -5.829606796766969E-5 0 -7.749826203915869E-5+2.204044431054463E-5i 6.038660835625681E-7-1.3873364922492581E-7i -2.443050292511359E-4+7.392103283005076E-5i 1.8700000000000007E-4 -5.6565968329444486E-5 0 -8.918085246572636E-5+2.5267309787056573E-5i 1.4577830639933565E-6-3.7591412298393354E-7i -2.644796385270059E-4+7.985231515315397E-5i 1.878749222456762E-4 -5.6554706695504444E-5 -1.5030769633512468E-6 -5.4095140033259825E-5+1.6079579238296077E-5i 6.615199339444148E-6-1.9026582764921501E-6i -1.566748735291375E-4+4.7932123500230246E-5i 1.8700000000000005E-4 -6.0026167605894906E-5 0 -8.42547581847896E-5+2.3907218065892217E-5i 2.5041427567697636E-6-6.87292431323742E-7i -2.4393741392267462E-4+7.383786652808505E-5i 1.8748926179667084E-4 -5.9888236332621116E-5 -1.4434416382700825E-6 -5.973481375099025E-5+1.7724322738735254E-5i 5.9815597790068385E-6-1.7333112779043107E-6i -1.531282247808229E-4+4.6997610730884435E-5i 1.8711573412928204E-4 -6.123463110197084E-5 -1.137978929670114E-6 -6.831375684800134E-5+2.0110693333762197E-5i 5.442498057966864E-6-1.5786447086262381E-6i -1.6476483853260573E-4+5.054099501239709E-5i 1.8700000000000002E-4 -6.17562672441201E-5 0 -7.879570617689877E-5+2.229687163087541E-5i 8.860922920059244E-8-8.026249373460637E-9i -2.4106168054503264E-4+7.291937791071667E-5i 1.8648453623426752E-4 -6.259351359373281E-5 -1.5282661021468528E-6 -8.635587967767849E-5+2.5680955527881325E-5i 8.29217257789804E-6-2.4206843140645884E-6i -1.427559581967087E-4+4.4304583018773567E-5i 1.8481957454036412E-4 -6.312806265054302E-5 0 -1.4840410956634047E-4+4.4277208557298184E-5i 7.817583646959528E-6-2.2545279809459673E-6i -1.1900080487961633E-4+3.875326590719898E-5i 1.887777555691939E-4 -3.6674256673855044E-5 0 1.104463301700363E-5-3.2110507478969437E-6i -6.492747494329138E-7+2.090700112240234E-7i -2.6790561761761724E-4+7.916625108281927E-5i 1.8881612167175976E-4 -3.32408888469718E-5 0 1.3433898634140906E-5-3.834210769526614E-6i -1.0273554824635767E-6+3.1764784056420583E-7i -2.812882196974925E-4+8.278208461554026E-5i 1.881145740434559E-4 -3.255588062141729E-5 -1.706421064038555E-6 -1.0795623902172535E-4+3.117053864238698E-5i 1.8073768629604803E-5-4.967595411492498E-6i -2.877626300081436E-4+8.475153920365838E-5i 1.8813143100035522E-4 -3.4915249816402455E-5 0 -5.610461116647055E-6+1.423749208528946E-6i -5.764102625015662E-7+1.943018336031388E-7i -3.3342268373717765E-4+9.790861595492389E-5i 1.899101955328988E-4 -3.60466612067226E-5 -1.700764664538235E-6 -4.989888451352731E-5+1.4598202360582846E-5i 1.0680988336098097E-5-2.9428533970421446E-6i -2.0916409378987367E-4+6.202049481393579E-5i 1.88067807046...
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This document was uploaded on 01/24/2014.

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