H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 6E-8+1.5496398027682654E-8i 1.1201453690484954E-7-3.360384623482898E-8i -1.3651766244433808E-4 -2.1200539351422771E-4 7.186453930566945E-4 -7.384965539091916E-9+2.355692454001375E-9i -8.558464958821305E-9+2.585674511410131E-9i 1.8506447720870186E-8-5.557045401816128E-9i -1.603912350695535E-4 -1.5677507635226493E-4 7.135826701564468E-4 -6.372382991109769E-8+1.9799336209991113E-8i -3.8602052090937306E-8+1.1620782846152685E-8i 1.1245880884538545E-7-3.3690205196143775E-8i -1.6330743934354542E-4 -1.5962553228594247E-4 7.265569005229275E-4 -8.203549611213572E-9+2.600910988564629E-9i -6.2356630480128455E-9+1.8834657531960983E-9i 1.8152128624811535E-8-5.44459940600594E-9i -2.1116654702574118E-4 -1.2780982157075454E-4 7.061000912953326E-4 -7.095453169522984E-8+2.1905471775002775E-8i -2.972453803384476E-8+8.938550003835632E-9i 1.0330043934815846E-7-3.0848540135935003E-8i -2.1500593878984558E-4 -1.3013363650840463E-4 7.189382747734295E-4 -1.0268775407913455E-8+3.2206682223118347E-9i -5.029698192001754E-9+1.5175560552395155E-9i 1.7721379448705217E-8-5.301553412996203E-9i -1.438311086467134E-4 -2.2336282530963292E-4 7.571442533990173E-4 -1.2605617018033281E-11+5.361225309361547E-12i -1.7574028428490956E-11+5.336993180335024E-12i 4.005798790931925E-11-1.1871553390691034E-11i -1.720560521655212E-4 -1.6817690008697525E-4 7.654795916223702E-4 -1.4420182697072983E-11+5.930048598906171E-12i -1.2510658664120575E-11+3.722160403249465E-12i 3.8303523907913205E-11-1.1207615803183612E-11i -1.462689240475052E-4 -2.271486359081013E-4 7.699772068464584E-4 -7.52357550750195E-19+8.407092920003314E-19i -5.505053669940266E-19+1.7569613094490072E-19i -3.106438097064525E-19+1.722501943334715E-19i -1.749722564395131E-4 -1.7102735602065282E-4 7.78453821988851E-4 -8.80889726528847E-19+8.821289103541331E-19i -4.476313676658331E-19+1.6147029835797379E-19i -3.3143036341085723E-19+2.600394306030247E-19i -2.2652411408215887E-4 -1.3710508132135492E-4 7.574528252077207E-4 -1.9174933270882765E-11+7.284483087751636E-12i -1.0603580258913607E-11+3.202444141475603E-12i 3.963673754948143E-11-1.1472141427253034E-11i -2.3036350584626326E-4 -1.3942889625900503E-4 7.702910086858176E-4 -9.87036203311266E-19+9.059835805714042E-19i -3.0619266750710316E-19+8.312409290847747E-20i -4.2094420393161767E-19+3.5655532520550443E-19i -3.1488917781660817E-4 -6.35195719647565E-5 6.755102291389779E-4 -8.355660150264529E-8+2.5573012963549017E-8i -1.2898178133973353E-8+3.862344828937416E-9i 8.041242797668964E-8-2.380547615218587E-8i -3.20614435595092E-4 -6.46744732732066E-5 6.87792233305141E-4 -1.3193017184245913E-8+4.087267392175047E-9i -2.3089005395246785E-9+6.952314691619537E-10i 1.4440234670824244E-8-4.285574082219426E-9i -3.3779020893054347E-4 -6.813917719855701E-5 7.246382458036307E-4 -2.667728026556663E-11+9.498642881075056E-12i -5.090683007816134E-12+1.531286381577453E-12i 3.462315699106609E-11-9.773107050710173E-12i -3.435154667090273E-4 -6.929407850700713E-5 7.36920249969794E-4 -1.2032314811257255E-18+9.430537740...
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This document was uploaded on 01/24/2014.

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