H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 146808860252E-6i -6.547990546699935E-5+1.992161195703973E-5i 1.1046458726253063E-4 -1.5591965785203684E-4 1.100681897872082E-6 3.42957376460451E-7-7.436926512810471E-8i -9.856154650682292E-6+2.9207369855066558E-6i -4.3262780286171254E-5+1.3448714955399677E-5i 1.067324180456387E-4 -1.5316060171193205E-4 7.500000000000002E-8 -1.1728444120340242E-7+7.201336755802146E-8i -3.9818044968886054E-5+1.1656504846339898E-5i -3.733091847281201E-5+1.232690032535443E-5i 1.0852436318585217E-4 -1.5319250030457757E-4 7.500000000000001E-8 -2.060722707492718E-7+9.46980207097714E-8i -4.047605106084588E-5+1.1854154076198359E-5i -3.6458016601575145E-5+1.2093428568690169E-5i 1.0766901102169128E-4 -1.5095563749752765E-4 7.500000000000001E-8 -2.814938099560127E-7+1.29355132133524E-7i -3.856393435770766E-5+1.1741936260814545E-5i -2.7446965433662974E-5+9.547386062578792E-6i 1.0817015204434913E-4 -1.544226210899282E-4 1.266441792866439E-6 -1.4910292612216227E-7+7.353568799258743E-8i -2.4975994832476144E-5+7.3320938730310876E-6i -4.3458816752873744E-5+1.3706481483169572E-5i 1.0440943100806514E-4 -1.5662218849847579E-4 1.4004773918604415E-6 -1.1499289056192928E-7+6.330173078382059E-8i -7.775062282030024E-6+2.3313806404469165E-6i -3.6806829038997215E-5+1.1533164459780465E-5i 1.0558666047556446E-4 -1.5876128565087087E-4 0 5.316736203242467E-8+3.6197844860419437E-9i 4.9442576724781885E-8-1.451959010345498E-8i -3.091036885046472E-5+9.709323422558979E-6i 1.0663887043344691E-4 -1.559254349151909E-4 1.39872602130504E-6 -1.715326121049896E-7+8.060039715457638E-8i -1.1387062867881053E-5+3.38454228845741E-6i -4.057640633087413E-5+1.2683555145110434E-5i 6.00428811880027E-5 -1.1980887948557692E-4 7.500000000000001E-8 -2.6074798604131272E-5+8.99005665711475E-6i -2.2057903213993888E-5+7.421807610707253E-6i -1.0086311017590534E-5+4.036343199704996E-6i 5.593722963006575E-5 -8.86157290797022E-5 8.231768338118231E-6 -5.144260372659753E-5+1.756866231177168E-5i -3.298231336897282E-5+1.0633458743656355E-5i -1.299113875713826E-5+4.157473506565268E-6i 6.607874268097234E-5 -9.017642289903225E-5 7.500000000000001E-8 -5.2392098852987945E-5+1.9063086135503525E-5i -4.53231360767397E-5+1.5290487354214372E-5i -2.2202275400428958E-6+1.6444326317728922E-7i 5.5094823696380395E-5 -9.750599721769211E-5 4.4083103984915294E-6 -4.617378492263245E-5+1.5770971120266904E-5i -2.651444996308585E-5+8.70843131768569E-6i -1.4794929747168734E-5+5.1623076887688845E-6i 5.834445160353897E-5 -1.0132462998617788E-4 7.500000000000002E-8 -4.4880768860643125E-5+1.5698131968152478E-5i -2.800601760374333E-5+9.40455703253712E-6i -1.1176051444687405E-5+4.1593676391957844E-6i 6.567236648773907E-5 -9.757850424187053E-5 7.500000000000002E-8 -4.412819928826728E-5+1.6022060087790297E-5i -3.859312865885241E-5+1.3146902486605317E-5i -4.173946835962292E-6+1.1891530627041194E-6i 6.382284908555467E-5 -1.267784078008744E-4 7.500000000000001E-8 -1.9149218572270515E-5+6.657396241828602E-6i -2.3227724745332554E-5+7.782834572101546E-6i -9.30568825502231E-6+3.77769277870...
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This document was uploaded on 01/24/2014.

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