H_75nm_L1_65um_D_2um_new

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Unformatted text preview: 246E-9-2.2962565870745153E-9i 3.7994714355398435E-7+1.9154219502853786E-7i -4.1693378194890075E-6+3.4324314163202666E-7i -7.220661508165861E-5 -1.5543712929867392E-4 -1.0482482476805835E-6 2.7448456954234663E-8-1.8593859954063163E-8i 3.4396520002741293E-7+1.2257312885372018E-7i -3.6904312212499708E-6+5.478671082848746E-7i -6.967615093195822E-5 -1.55E-4 0 5.43851281233315E-9-5.165673244053424E-9i 4.3641761798607385E-7+2.1720699097819604E-7i -4.20587850213157E-6+3.717886285188214E-7i -6.968128198882397E-5 -1.5577194163945364E-4 -1.0819321036830756E-6 2.808085518343782E-8-1.9792342139307968E-8i 2.753507608611409E-7+8.231556027005822E-8i -3.679830254871286E-6+6.111623238294308E-7i -6.794814247869451E-5 -1.5499999999999997E-4 0 -3.584845959433055E-9-8.370951552298203E-9i 4.391683554849922E-7+2.192058241094658E-7i -4.222412984875849E-6+4.0842722509075154E-7i -6.745319160766634E-5 -1.5517233981579735E-4 -1.4446385618337446E-6 3.781372390484406E-8-2.445843353946179E-8i 4.2288410797762945E-7+1.5080521339029887E-7i -3.7341046195587668E-6+6.540743558245549E-7i -4.822460647737574E-5 -1.5459748117598154E-4 -1.0555408609669805E-6 8.828269021723956E-9-3.4370269446151734E-8i 3.5081799892667035E-7+1.3900409443386165E-7i -4.304084404612926E-6+9.659270416708527E-7i -5.1409178093695975E-5 -1.5503737513821982E-4 -1.1146537526214088E-6 2.222434655042344E-8-3.054516317988804E-8i 3.1888494203042245E-7+1.1596470712607862E-7i -4.201535330815425E-6+8.893460790014447E-7i -5.239606639932126E-5 -1.5499999999999997E-4 0 5.391075127980649E-10-8.348548793946086E-9i 1.9791252406989314E-7+1.2028981514616844E-7i -4.52020755463424E-6+6.90513177714989E-7i -4.995112767048967E-5 -1.5534278399424853E-4 -1.1306877778947792E-6 2.4199925536862638E-8-3.07840076302675E-8i 2.5583215463737447E-7+8.155793873876789E-8i -4.221804634498931E-6+9.134834511523304E-7i -4.8940049492793804E-5 -1.5499999999999997E-4 0 -8.208281797317252E-9-1.1771537480886884E-8i 2.005576548447241E-7+1.426729588915876E-7i -4.575194921794552E-6+7.626371538044684E-7i -5.0668057946057495E-5 -1.5499999999999997E-4 0 4.477117954149179E-9-3.6739369879690287E-9i 1.878074667449603E-7+1.3519223068803043E-7i -4.570450470075199E-6+7.108728556833662E-7i -3.8467782865338436E-5 -1.4750005945423085E-4 0 -4.798376676188406E-7-2.1279807521645822E-7i 7.054141627237644E-8+2.9264851725701718E-8i -4.9923978306375835E-6+1.3320688446913614E-6i -3.829355009601762E-5 -1.458955262036561E-4 -1.8296807744495218E-6 -1.8621453853625507E-7-1.7849939144638936E-7i 1.8388844753607698E-7+3.2652914861762263E-9i -5.0494190567133525E-6+1.3555256203419563E-6i -3.895036344118776E-5 -1.4920630070872282E-4 0 -3.6901956033154325E-7-1.635074938957648E-7i 9.875178448096044E-8+4.5059493700150276E-8i -4.771950839859814E-6+1.3295820520604916E-6i -3.7828102003655615E-5 -1.496622954691087E-4 -2.0130615262674128E-6 -5.659564187314051E-8-1.2127242323426872E-7i 1.8589720531130204E-7-4.90208946847735E-10i -4.84319200591802E-6+1.308831622682884E-6i -3.883824329407867E-5 -1.5089000098956557E...
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This document was uploaded on 01/24/2014.

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