H_75nm_L1_65um_D_2um_new

644863609529193e 7i 4182875111395698e 6

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Unformatted text preview: 72296E-4 1.558530560846361E-4 1.1410876865635045E-6 1.0617412581070962E-7-1.358601416923122E-8i 1.0236741449522191E-5-3.0428388821862606E-6i -4.180886292085434E-5+1.303767254196564E-5i 1.2423619172530087E-4 1.5693959618060693E-4 0 1.1192455122160344E-7-9.211501336257272E-9i -2.095608417836522E-6+5.785191658661379E-7i -3.664560704886802E-5+1.1445617984426109E-5i 1.223762918361395E-4 1.5699635526654168E-4 0 8.591682427033787E-7-2.1674711634528387E-7i -2.7783298726131046E-6+7.840969333946721E-7i -3.70962364976673E-5+1.1584037348054028E-5i 1.308302291910637E-4 1.546871740044395E-4 1.4090675400698707E-6 7.497303575686077E-7-2.190531845322623E-7i 2.0977585847241154E-5-6.101352936482047E-6i -4.169175360771636E-5+1.2997776364115563E-5i 1.3277047837606182E-4 1.5384853910397175E-4 7.500000000000002E-8 3.5330615375744275E-7-9.579896495526263E-8i 3.5251058620098005E-5-1.001768480107184E-5i -4.2071907442200745E-5+1.3386267983807812E-5i 1.2902237508042482E-4 1.5871888824916337E-4 0 -4.382012740321449E-9+2.116754241062662E-8i -2.7266403502935867E-7+6.602615023702334E-8i -2.953644275855028E-5+9.258134868282383E-6i 1.2604105767817793E-4 1.5852414834894058E-4 0 -3.105795180631658E-8+2.984131604448366E-8i -5.108442865967263E-7+1.3567536429186108E-7i -3.090375781392393E-5+9.68547383342857E-6i 1.2810124365365916E-4 1.5903545337861042E-4 1.8392330877309572E-6 2.461043180779978E-7-6.524051747289711E-8i 4.391643164122709E-6-1.355791288805703E-6i -2.8077946400637003E-5+8.824385489262277E-6i 1.2690784467134434E-4 1.6056198236104945E-4 0 -4.514926276671321E-8+3.2190997386235175E-8i -9.457658268732485E-8+1.865379999540136E-8i -2.5837645353638588E-5+8.13152274926744E-6i 1.3433426410751866E-4 1.5698906020584724E-4 0 -1.6392653688808434E-7+6.819617085103424E-8i -1.8465647562143509E-6+5.17641914369758E-7i -3.5187569793624284E-5+1.0906090451381825E-5i 1.3360045538609962E-4 1.55E-4 0 -8.858836819811622E-7+2.7733857490348963E-7i 2.1695686533005536E-6-8.890297573795145E-7i -6.205444521278913E-5+1.8565390703884077E-5i 1.3362356597353765E-4 1.5500000000000003E-4 7.500000000000001E-8 1.955039230232262E-7-4.038272904215908E-8i 1.0292844782720883E-5-2.8720825169444533E-6i -6.056592722048172E-5+1.8203647199218495E-5i 1.3326148143352304E-4 1.5543626785034784E-4 2.006985851841095E-6 6.735311785360699E-7-2.0409254613462262E-7i 1.4432291353788551E-5-4.272892889831126E-6i -3.557459790719848E-5+1.11170701049605E-5i 1.3451654611939623E-4 1.532729854307632E-4 7.500000000000001E-8 6.254862462751199E-7-1.8190635135972856E-7i 3.5906861866547014E-5-1.0282182381782246E-5i -3.603064556564671E-5+1.1723306914902251E-5i 1.3245303819744915E-4 1.563383918531575E-4 0 -3.1831225020523593E-7+1.0852409751241844E-7i -9.842022129371967E-7+2.7784633349625665E-7i -4.043313981801458E-5+1.2458335259002367E-5i 1.303080475543899E-4 1.5700034496115965E-4 1.6195501139142347E-6 1.688220902778398E-7-4.7105972539896825E-8i 7.06249441728311E-6-2.13311282851918E-6i -3.355691958338974E-5+1.0479528749679038E-5i 1.3221989185879378E-4 1....
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This document was uploaded on 01/24/2014.

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